Toshiba Ceramics Co., Ltd.

Shigeru Abe

Yasumi Sasaki

Takashi Tanaka

Kazunori Meguro

Nobuyuki Joshima

Toshiaki Itoh

An electrolysis apparatus has a furnace for setting a silica glass component such as a process tube or crucible, a heater for heating the component, a sensor for measuring a temperature of an inside portion of the furnace, an anode and an cathode for applying a voltage across the component so as to electrolyze the component, a tube for holding the anode, a device for supplying an inert gas into a space between the anode and the holding tube, and a DC power source connected to the anode and the cathode.

Electrolysis apparatus

A radiant type heater for use in a heating furnace has inner and outer concentric tubes. The tubes have a structure in which silicon carbide particles are joined to each other by a sintering aid such as an aluminum compound sintering aid or a boron compound sintering aid.

Radiant tube type heater

A silicon carbide process tube which can be used for heat-treating a semiconductor device in a diffusion step, oxidation step and etc.. This silicon carbide process tube is characterized in that the inner surface of the process tube has a surface coarseness of 150 .mu.m or less.

Growing community of inventors

Oguni-machi, Japan

Shigeru Abe