Kuroda Seiko Co., Ltd.

Kuroda Precision Industries Ltd.

Kuroda Pneumatics Limited

Shigeo Tamaki

Kazuhiro Hozumi

Kosuke Umeda

The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.

Switch valve device

Electromagnetic valve

An electromagnetic valve including an electromagnetic unit having a magnetic core, a coil bobbin arranged around the core, an electromagnetic coil wound around the bobbin, a stationary yoke and a first valve seat formed in a flange of the coil bobbin and a valve unit having a movable yoke, a valve stopper provided at an end of the movable yoke whose other end is rotatably coupled with the stationary yoke and a second valve seat provided in opposition to the valve stopper. When the coil is not energized, the valve stopper is resiliently urged against the second valve seat and a first fluid passage connected to the first valve seat is communicated with a valve chamber in the valve unit, but when the coil is energized, the movable yoke is attracted to the core to urge the valve stopper against the first valve seat and a second fluid passage connected to the second valve seat is communicated with the valve chamber.

An improvement of an electromagnetic valve apparatus, in which a fluid passage is opened or closed by a movable iron core. The invention provides a hand-operated transfer device having a flat spring member with a large diameter annular element and a small diameter annular element, and an extended element which is connected with both annular elements at one portion. A hand operated member has an inner end which contacts an end of the extended element and is operable from the other end from the outside of the valve. Operation of the member results in movement of the iron core by the small diameter annular element.

Growing community of inventors

Asahi, Japan

Shigeo Tamaki