Hitachi-High-Technologies Corporation

Shigeo Otsuki

Minori Noguchi

Kei Shimura

Masaaki Ito

Kenji Aiko

Shuichi Chikamatsu

Hiroyuki Yamashita

Masayuki Ochi

Takuaki Sekiguchi

Shigeru Abe

Hidetoshi Morokuma

Hiroyuki Noda

Yoko Sato

Mitsuru Onuma

Koji Ishiguro

Nami Ibi

In the spectrometer, heavy loads are arranged centrally inside a case having a height smaller than a width, and having a depth smaller than the height. The heavy loads include a vacuum chamber, a vacuum pump which evacuates the vacuum chamber, a sample introduction unit which introduces a sample to be measured and evaporates the sample, an ionization unit which ionizes the evaporated sample and provides it to the vacuum chamber, and an ion detection unit which is connected to the vacuum chamber. Circuit board storage units which store a plurality of circuit boards with a predetermined space therebetween are formed on both sides along a width direction of the case.

Mass spectrometer

A defect inspection apparatus includes: stages each mounting an inspecting object on which a circuit pattern having a group of parallel lines is formed, and each running perpendicular or parallel to the group of lines; an illumination optical system which illuminating a surface of the inspecting object with a slit beam being slit light so that a longitudinal direction of the slit beam is substantially perpendicular to the running directions of the stages, and which has a first inclined angle formed by the direction of the group of lines and a projection line, of an optical axis of the slit beam, to the inspecting object; a spatial filter that shields or transmits reflected and scattered light of the inspecting object according to a difference in distribution of orientation; and a detection optical system that detects the reflected and scattered light transmitted through the spatial filter by image sensors. Moreover, the illumination optical system illuminates the inspecting object with another slit beam from a direction opposite to an incident direction of the slit beam on a plane.

Defect inspection apparatus and defect inspection method

Growing community of inventors

Kasama, Japan

Shigeo Otsuki