Other

Shigeo Ohshio

Hidetoshi Saitoh

Norio Tanaka

Nobuyoshi Nambu

Atsushi Nakamura

Masanori Furukawa

Ryo Satoh

Hideki Sunayama

A process for forming a thin metal oxide film is disclosed that comprises molding an amorphous powder of organic metal chelate complexes to obtain a target. The process also includes subjecting the target to a PVD process that forms the thin metal oxide.

Process for producing thin metal oxide film

A process for preparing a target for use in production of a thin metal oxide film that comprises molding an amorphous powder of organic metal chelate complexes to obtain the target. The process also includes mixing metallic materials with an organic chelating agent so as to give a predetermined metal composition to prepare a transparent aqueous solution of organic metal chelate complexes. The process also includes spray-drying the aqueous solution to obtain an amorphous powder of the organic metal chelate complexes.

Process for preparing a target for use in the production of a thin metal oxide film

A material having a titanium dioxide crystalline orientation film oriented in a specific direction on a surface of a substrate is produced by spraying a vaporized titanium alkoxide onto the surface of the substrate heated under atmospheric pressure along with an inert gas as a carrier. The material having the titanium dioxide crystalline orientation film is excellent in properties such as an antimicrobial activity, a stain resistance, an ultra-hydrophilic property and the like, and is widely used as kitchen appliances such as cooking utensils, tableware and a refrigerator, tools for medical care, materials for a toilet or a toilet room, a filter of an air-conditioner, electronic parts, building materials and road-associated materials.

Material having titanium dioxide crystalline orientation film and method for producing the same

Growing community of inventors

Koshijimachi, Japan

Shigeo Ohshio