Ulvac, Inc.

Shigeo Nakanishi

Satoru Toyoda

Junichi Hamaguchi

Kazumasa Horita

Shuji Kodaira

Koukichi Kamada

Tomoyuki Yoshihama

A film formation apparatus includes: a chamber having an inner space in which both a body to be processed and a target are disposed so that the body to be processed and the target are opposed to each other, a first magnetic field generation section generating a magnetic field in the inner space to which the target is exposed; a second magnetic field generation section generating a perpendicular magnetic field so as to allow perpendicular magnetic lines of force thereof to pass between the target the body to be processed; and a third magnetic field generation section disposed at upstream side of the target as seen from the second magnetic field generation section.

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Susono, Japan

Shigeo Nakanishi