Hitachi, Ltd.

Hitachi Medical Corporation

Shigeo Kubota

Kunio Harada

Minoru Yoshida

Keizo Suzuki

Tetsuo Ono

Hideki Kohno

Yoshio Watanabe

Seiichi Murayama

Toshio Takahashi

Yasuo Kato

Shigeo Kato

Susumu Hiraoka

Takayuki Hayakawa

Sakae Saito

Takaji Suzuki

Sadao Matuoka

Mituhiro Tachibana

An apparatus for treating solid surface using a thermally excited molecular beam according to the present invention is capable of completely preventing flying of contaminant caused by a heating source to a sample. To achieve this, in the present invention, the heating source for exciting the molecules is hermetically separated from the sample. Alternatively, a container where the heating source is housed and a container where the sample is accommodated are separated such that a conductance between the two containers is sufficiently small. In this way, chemical reactions between the molecular beam of the reactive gas which is highly reactive and the heating source heated to high temperatures can be eliminated, and flying of the contaminant to the sample can thus be greatly reduced. As a result, flying of the contaminating substances caused by the heating source to the sample can be prevented, and reduction in the surface treating rate of the sample, caused by the contaminant, can be prevented.

Surface treating apparatus, surface treating method and semiconductor

A plasma X-ray source comprises inner and outer cylindrical electrodes disposed coaxially and with a certain distance with respect to each other, an electrical insulator disposed between end portions of the inner and outer cylindrical electrodes, and a discharge vessel disposed to envelop the inner and outer cylindrical electrodes. A pulse voltage is applied between the inner and outer cylindrical electrodes to produce plasma in the discharge vessel. An electrically conductive spherical shield is disposed to envelop a space where the plasma is pinched, and the spherical shield is maintained at a potential equal to that applied to the outer cylindrical electrode.

Plasma x-ray source

A radiation detecting apparatus includes a pair of substrates disposed face to face in such a manner that a plurality of grooves provided in one of the facing surfaces at a predetermined interval face a plurality of grooves provided in the other of the facing surfaces at the predetermined interval. Radiation shielding plates are inserted at both ends thereof into a facing pair of grooves to be held by both of the substrates, scintillators are mounted on a corresponding one of the radiation shielding plates, and photodetectors are fixed to either one of the facing surfaces of the substrates between adjacent grooves so that a plurality of facing pairs of photodetectors are juxtaposed.

Radiation detecting apparatus

Growing community of inventors

Kokubunji, Japan

Shigeo Kubota