Tokyo Electron Limited

Shigenori Todate

Toshihiko Iijima

Taku Mizutani

Ichiro Namioka

Katsuhiko Matsuda

Takahiro Ito

Kazuhisa Nakama

A manufacturing process system includes: a plurality of processing devices which processes workpieces, with respective equipment associated with the plurality of processing devices; a transfer device which transfers the workpieces to the plurality of processing devices; a host computer which performs creating a transfer plan including information of timings at which the workpieces are carried in and out by the transfer device and acquiring an operation schedule including information of maintenance time from the plurality of processing devices; and a processing device group controller which performs acquiring the transfer plan and the operation schedule from the host computer, comparing the transfer plan and the operation schedule of each processing device, specifying the last process before maintenance for each processing device, detecting the end timing of the specified process, and instructing each processing device to be switched to an idle state at the end timing along with the associated equipment.

Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method

There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.

Modifying operational efficiency by repositioning process apparatus

A control system structured by a plurality of controller units for individually controlling a plurality of processing units for performing predetermined processes to a substrate, and a control unit including a server unit having a memory for reading and storing the process data generated by each control unit and a client unit having an editing section for reading the stored process data from the server unit and editing this process data and a display section for displaying the edited data.

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Tokyo, Japan

Shigenori Todate