Fujitsu Corporation

Shigenobu Ishihara

Yoshikazu Arisaka

Kunihiro Itagaki

Takao Watanabe

Morihiko Hamada

Tsutomu Tatematsu

Kenji Togashi

Shigekazu Aoki

Naoyoshi Kikuchi

Tetsuhiro Nanbu

Tomohiro Giga

A testing method of a semiconductor integrated circuit device includes a testing step of conducting a functional test by supplying test pattern data to a semiconductor integrated circuit device mounted upon a testing apparatus, and a post processing step conducted after the testing step for continuously driving the semiconductor integrated circuit device by supplying dummy test pattern to the semiconductor integrated circuit device, wherein the test pattern data is supplied with a first system clock speed while the dummy test pattern data is supplied with a second, slower system clock speed, the post processing step switching a system clock speed of the testing apparatus from the first system clock speed to the second system clock speed at the same time as finishing of the testing step.

Testing method and testing apparatus

A probe card is used to test an electronic device. The probe card includes a base plate and a cantilever-type probe arranged on the base plate. The cantilever-type probe has an end that contacts the contacted body and moves when contacting the contacted body. A stopper arranged on the base plate restricts the movement of the cantilever-type probe.

Probe card, having cantilever-type probe and method

A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.

Probe card and method for manufacturing probe card

Growing community of inventors

Kawasaki, Japan

Shigenobu Ishihara