Taiyo Yuden Co., Ltd.

Shigemitsu Koike

Hirokazu Kobayashi

Masayuki Inai

Toshimichi Shimizu

A dicing apparatus is provided with a first position for feeding a workpiece before dicing, a movable machining table capable of retaining the workpiece, a second position for mounting the workpiece before dicing on the machining table, a third position for washing the diced workpieces, a fourth position for retaining the washed workpieces, a dicing mechanism provided at a dicing range spaced apart from the second position, for dicing the workpiece, and a transferring mechanism for transferring the workpiece from the first position to the second position, from the second position to the third position, from the third position to fourth position, respectively. The first to the fourth positions are disposed so as to be circumferentially, equally spaced apart from each other by 90 degrees, and the workpiece transferring mechanism has three rotating arms which in conjunction with each other, form a substantial &ldquo;T&rdquo; shape, and at its central portion a shaft for pivoting the rotating arms, each of the rotating arms being provided with a suction head for holding the workpiece.

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Tokyo, Japan

Shigemitsu Koike