Sumitomo Electric Industries, Limited

Tokyo Tungsten Co., Ltd.

Shigehiko Takaoka

Hisanori Ohara

Yasuhiro Katoh

Hiromu Kawai

Takashi Yoshioka

Takehiko Hayashi

A long-life, inexpensive rotary anode for use in an X-ray tube having an X-ray generating layer formed by CVD on a graphite substrate and capable of producing high-power X-rays without the possibility of thermal cracks or delamination. When forming the X-ray generating layer of a tungsten-rhenium alloy on the graphite substrate through a rhenium intermediate layer by CVD, material gases are supplied intermittently so that the entire part or only the surface area of the X-ray generating layer will be formed of laminated structure of ultra-thin films each 0.1-5.0 microns thick. The content of rhenium in the tungsten-rhenium alloy forming the X-ray generating layer has a gradient form, i.e. increases from the interface with the rhenium intermediate layer toward the surface, so that the total amount of rhenium added can be reduced.

Rotary anode for x-ray tube

A method for manufacturing a rotary anode for use in an X-ray tube is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.

Method for manufacturing a rotary anode for X-ray tube

A rotary anode for use in an X-ray tube has a graphite substrate plate, an intermediate layer made of a metal that does not react with graphite, and an X-ray generating layer provided on the intermediate layer for generating X-rays when electron impact is applied. The intermediate layer is a rhenium film having an equiaxed grain structure. A method for manufacturing such a rotary anode is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.

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Tokyo, Japan

Shigehiko Takaoka