Shincron Co., Ltd.

Nec Corporation

Restaurant Technology Inc.

Shigeharu Matsumoto

Kazuo Kikuchi

Masafumi Yamasaki

Shigetaro Ogura

Qi Tang

Takeshi Sakurai

Paul M Bouzide

Shinichiro Saisho

John W Nelson

Inge B Kristiansen

Yung-Chun Tsau

Patrick F Castor

Yizhou Song

Roger W Carlson

Martin J Moderi

There is disclosed a method and apparatus for forming a thin film of a composite metal compound. Independent targets formed of at least two different metals are sputtered so as to form on a substrate an ultra-thin film of a composite metal or an incompletely-reacted composite metal. The ultra-thin film is irradiated with the electrically neutral, activated species of a reactive gas so as to convert the composite metal or the incompletely-reacted composite metal to a composite metal compound through the reaction of the ultra-thin film with the activated species of the reactive gas. The formation of the ultra-thin film and the conversion to the composite metal compound are sequentially repeated so as to form on the substrate a thin film of the composite metal compound having a desired thickness.

Method for forming a thin film of a composite metal compound and apparatus for carrying out the method

The present invention is drawn to an apparatus for forming a thin film. The apparatus includes a vacuum chamber; a vacuum apparatus connected to the vacuum chamber; a holder placed in the vacuum chamber, which holder holds a substrate and is rotated by means of a rotating mechanism; a plasma CVD apparatus; and a sputtering apparatus, wherein the plasma CVD apparatus and the sputtering apparatus are placed in a single vacuum chamber and a thin film having an medium refractive index is formed on the substrate held by the holder, by means of the plasma CVD apparatus and the sputtering apparatus. The method making use of such an apparatus is also disclosed.

Apparatus and method forming thin film

A method for forming a thin film of a metal compound is disclosed. Within a vacuum chamber, a metallic ultra-thin film of a metal or an incompletely-reacted metal is deposited on a substrate. The metallic ultra-thin film is brought in contact with the electrically neutral activated species of a reactive gas so as to convert the metallic ultra-thin film to an ultra-thin film of a metal compound through the reaction of the metallic ultra-thin film with the activated species of the reactive gas. The above-described steps are sequentially repeated so as to deposit on the substrate the ultra-thin film of the metal compound in layers until a thin film of the metal compound having a desired thickness is formed on the substrate.

Method for forming a thin film of a metal compound by vacuum deposition

An obstacle layer is grown on an inner surface of a mask structure defining a first opening over a first area assigned to a thick field oxide layer during a growth of the thick field oxide layer, and prevents a silicon substrate beneath a peripheral area of the thick field oxide layer from a dopant impurity implanted through the thick field oxide layer into the silicon substrate beneath the central area of the thick field oxide layer so that a channel stopper is never exposed to a major surface of the silicon substrate outside of the thick field oxide layer.

Process of forming channel stopper exactly nested in area assigned to

A computer system for entering, processing and recording sales of items is provided, which is especially suitable for use in retail sales, particularly quick service restaurants. The system includes a plurality of programmable POS registers for entering and tabulating customer orders, an off-line processor for programming the programmable POS registers, shared memory for recording data entered and tabulated by the programmable POS registers, and a communication structure for networking a plurality of programmable POS registers, the off-line processor and the shared memory. In one embodiment, the system includes an access control system for enabling access to the POS registers, the off-line processor or the shared memory if operation of those are authorized. In another embodiment, each POS register includes a programmable display for displaying a hierarchial menu of a plurality of keys, each of the keys being visually associated with a label of salable items or categories of salable items, and a touch sensitive apparatus for detecting when one of the keys has been touched by a human operator. The programmable display is responsive to the touch-sensitive apparatus so that a human operator can enter a particular salable item into the programmable display by touching the key which is visually associated with the label corresponding to the particular salable item or category in which the particular salable item is included.

Data processing system and method for retail stores

A photoresist mask composed of a plurality of isolated plane patterns having no opening is formed on a main surface of a semiconductor substrate. The breakdown of the gate oxide film due to charge build up can be prevented because no photoresist mask opening patterning is involved.

Process of manufacturing a semiconductor device by using a photoresist

Growing community of inventors

Tokyo, Japan

Shigeharu Matsumoto