Fujikin Inc.

Other

Tadahiro Ohmi

Shigeaki Tanaka

Michio Yamaji

Nobukazu Ikeda

Keiji Hirao

Hiroshi Morokoshi

Yuji Kawano

Kosuke Yokoyama

Masayuki Hatano

Tsutomu Shinohara

Shigeru Itoi

Michio Kuramochi

Takashi Hirose

Yukio Minami

Izuru Shikata

Mutsunori Koyomogi

Kenji Tsubota

Ichiro Tokuda

Hisashi Tanaka

Naoya Masuda

Yasuyuki Omata

Ichiro Mine

Hideki Fujimoto

Naoyuki Sato

Noboru Uzawa

Masakazu Fukui

Michihiro Kashiwa

The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint memberincludes a channel blockincluding a V-shaped channelformed therein for communicating adjacent fluid control devicesandto each other at their lower-end openings, and a pressure sensorprovided on a side surface of the channel block. The channel blockis provided with a branched channelwhich is branched from the V-shaped channeland is communicated to the pressure sensor

Sensor-equipped joint member

A heating apparatus () has sheet heaters () arranged in both sides of at least one line and heating fluid control devices () and joint members (), heat insulating boards () made of an engineering plastic are respectively brought into contact with outer sides of the sheet heaters (), and the heat insulating boards () are coupled to each other by at least one thread member (), whereby the sheet heater () is prevented from dropping out.

Fluid control apparatus with heating apparatus

A fluid control apparatus comprises lines A , A , A , A , A , B , B , B each removably attached to a substrate by a plurality of brackets , and channel communication means which are removable upward.

Fluid control apparatus and gas treatment system comprising same

An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

Fluid control apparatus

A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.

Couplings for fluid controllers

A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.

Shutoff-opening devices and fluid control apparatus comprising such

A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.

Shutoff-opening device

A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

Growing community of inventors

Osaka, Japan

Shigeaki Tanaka