Taiwan Semiconductor Manufacturing Comp. Ltd.

Shiaw-Lin Chi

Chien-Wei Wang

Chih-Chien Chang

Chien-Fei Cheng

Chang-Hsi Lin

Kuan Liang Wu

Birgie Kuo

Kun-Chi Liu

Fang-Ni Wu

Ming Tsang Yu

Yi-Fang Su

Wen Jen Chiu

Wei-Chin Shiau

Chen Hsin Hsiung

Yu-Jye Lan

Lieh-Jung Chen

Chia Hui Hsu

A manufacturing management system and method. The system includes a manufacturing execution system and a plurality of manufacturing sites coupled to the manufacturing execution system. The manufacturing execution system comprises management data to support the manufacturing sites. Each manufacturing site comprises a corresponding site attribute. At least one of the manufacturing sites receives a lot, queries the management data for the lot from the manufacturing execution system according to lot identification and the site attribute of the manufacturing site receiving the lot, and processes the lot accordingly.

Manufacturing management system and method

The present invention provides an Intelligent Engineering Data Analysis (I-EDA) system and method to help prevent low wafer yield and prevent occurrences of abnormal events. The I-EDA has a non-conforming wafer tracing (NCWT) system that operates to correlate occurrences of abnormal events with low wafer yield. The method generally has the steps of performing a fabrication operation on wafers disposed within a wafer lot; determining if an abnormal event occurred while performing the fabrication operation on the wafers disposed within the wafer lot; using a NCWT to determine a statistical correlation between an occurrence of an abnormal event and a wafer yield of the wafers being processed during the occurrence of the abnormal event if the abnormal event occurred during processing of the wafers disposed within the wafer lot; and using the determined statistical correlation to analyze the fabrication process and thereby improve wafer yield.

System and method to analyze low yield of wafers caused by abnormal lot events

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Hsinchu, Taiwan

Shiaw-Lin Chi