Taiwan Semiconductor Manufacturing Comp. Ltd.

Industrial Technology Research Institute

Shi-Ming Wang

Yu Kai Chen

Li-Jen Wu

Oliver Yu

Su-Yu Yeh

Ko-Bin Kao

Li-Ren Lin

Huei-Chi Chiu

Sharon Yang

Wei-Ming You

Chia-Hung Tsai

Chia-Hung Chung

Chin-Lung Liu

Chien-Fei Cheng

Cheng-Chang Chang

Yuan-Yu Feng

Chien-Hua Li

Guan Jung Chen

Lung-Wu Chang

Wen-Shiung Chen

Cheng Wei Chen

Jian-Hua Huang

Yu-Lin Du

Bruce Chen

Yuan-Ching Lu

Forster Yuan

Pei-Chen Yeh

Albert Day

Tzu-Yang Wang

An apparatus for automatically cleaning a nozzle of a gas supply system is provided. The apparatus includes a carrier with a gas inlet that is adapted to sealingly mate with the nozzle of the gas supply system and an automated nozzle cleaning system in the carrier. The automated nozzle cleaning system includes a first nozzle cleaning device, a second nozzle cleaning device, and a function switching plate. The function switching plate comprises a plurality of through holes, a first through hole of the plurality of through holes is configured to engage the first nozzle cleaning device with the gas inlet when the function switching plate is positioned at a first position, and a second through hole of the plurality of through holes is configured to engage the second nozzle cleaning device with the gas inlet when the function switching plate is positioned at a second position.

Automated nozzle cleaning system

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

Photoresist bottle replacement system

Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder.

Chemical replacement system

The present disclosure describes a container for placing an object therein. The container includes a container body and a lid over the container body, a collision-preventing portion attached to one or more of the container body and the lid and configured to buffer an impact force, a pairing recognition mechanism configured to detect an object placed in the container body, and a liquid-detecting sensor configured to detect a leakage from the object.

Photoresist bottle container

A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations. The lamp-control parameters for temperature probes of the RTP system are then calculated based on the baseline characteristic data and the zone characteristic data.

Method for temperature control in a rapid thermal processing system

A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.

Method for aligning a loadport to an overhead hoist transport system

A semiconductor fabrication enterprise includes fabrication equipment, transportable containers for work&#x2014;in&#x2014;process and an enterprise information system. The transportable containers have associated radio frequency tags having identification codes uniquely identifying the carriers in the fabrication process. The enterprise information system contains data corresponding to each such identification code. The identification codes are read by a radio frequency interrogation device, and the radio frequency interrogation device carries out transactions with the enterprise data system to transfer the data corresponding to the identification codes to the radio frequency interrogation device. The radio frequency tags may be adapted for read/write functionality allowing for writing data to the radio frequency tags and synchronization of radio frequency tag data and enterprise information system data.

Wireless wafer carrier identification and enterprise data synchronization

A device is designed to automate the process of stripping residual yarn from a yarn tube. The device comprises a feeding mechanism, an index dial, a residual yarn removing mechanism, a compression mechanism, and an arranging mechanism. The automated device enhances the recycling quality of the stripped residual yarn and minimizes the likelihood that the yarn tube is damaged in the stripping process.

Automated device and method for stripping residual yarn from yarn tube

Growing community of inventors

Tainan, Taiwan

Shi-Ming Wang