Taiwan Semiconductor Manufacturing Comp. Ltd.

Shi-Chi Chen

Wei-Chih Chen

Jen-Ti Wang

Kuo-Fong Chuang

Ting-Wei Wang

A method includes moving a wafer transport device to a position above a load port; lowering a hoist unit of the wafer transport device above the load port, wherein the wafer transport device has a plurality of belts, each of the belts is connected to the hoist unit and wound around a respective belt winding drum; detecting sound waves from the belts by using at least one acoustic sensor to measure tensions of the belts; and comparing the tensions from the belts to determine an inclination of the hoist unit.

Method for transporting wafers

A wafer transport device is moved on a transport rail, and stopped above a load port having a top surface. A light beam is projected onto the top surface of the load port, and image of the top surface is and the light beam is captured. A position of the hoist unit of the wafer transport device is aligned with respect to a position of the load port according to the image. The hoist unit is lowered toward the load port.

Growing community of inventors

Taichung, Taiwan

Shi-Chi Chen