Chinese Academy of Sciences

Shenghao Wang

Shijie Liu

Jianda Shao

Qi Lu

Weiwei Wang

Kaizao Ni

Tianzhu Xu

You Zhou

A surface defect measuring apparatus and method by microscopic scattering polarization imaging is provided. The apparatus mainly comprises a laser, a first converging lens, a rotary diffuser, a second converging lens, a diaphragm, a third converging lens, a pinhole, a fourth converging lens, a polarizer, a half-wave plate, a polarizing beam splitter, an X-Y translation stage, a sample, a microscope lens, a quarter-wave plate, a micro-polarizer array, a camera and a computer. The micro-polarizer array is adopted to realize real-time microscopic scattering polarization imaging of the surface defects; a polarization-degree image is calculated to improve the sensitivity for detecting the surface defects of the ultra-smooth element, and the effective detection of the surface defects of a high-reflective coating element is also realized, and the requirement for rapid detection of the surface defects of a meter-scale large-aperture ultra-smooth element can be met.

Surface defect measuring apparatus and method by microscopic scattering polarization imaging

Device and method for measuring in-situ time-resolved X-ray absorption spectrum. The device comprises an X-ray source, a first slit, an acousto-optic tunable X-ray filter, a radio frequency transmitter, a second slit, a front ionization chamber, a front ionization chamber signal amplifier, a sample to be tested, a rear ionization chamber, a rear ionization chamber signal amplifier, a data collector, and a computer. The X-ray source, the acousto-optic tunable X-ray filter, and the radio frequency transmitter are used to generate a monochromatic X-ray beam; the front ionization chamber is used to measure the intensity of the X-ray beam before passing through the sample; the rear ionization chamber is used to measure the intensity of the X-ray beam after passing through the sample; the front ionization chamber signal amplifier, the rear ionization chamber signal amplifier, the data collector, and the computer are used for data acquisition and data processing.

Device and method for measuring in-situ time-resolved X-ray absorption spectrum

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Shanghai, China

Shenghao Wang