University System of Maryland

Sheng Li

Gary W Rubloff

Reza Ghodssi

Hyunmin Yi

Li-Qun Wu

Jung Jin Park

Mark Joseph Kastantin

Theresa Michelle Valentine

A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.

Fabrication and integration of polymeric bioMEMS

Growing community of inventors

Greenbelt, MD, United States of America

Sheng Li