Taiwan Semiconductor Manufacturing Comp. Ltd.

Sheng Kai Yeh

Jen-Yuan Chang

Chi-Yuan Shih

Shih-Fen Huang

Hsiang-Fu Chen

Chia-Ming Hung

You-Ru Lin

A semiconductor device and method of forming such a device includes a MEMS component including one or more MEMS pixels and having a MEMS membrane substrate and a MEMS sidewall. The semiconductor device includes an analog circuit component bonded to the MEMS component, and which includes at least one analog CMOS component within an analog circuit insulative layer, and an analog circuit component substrate. The semiconductor device includes an HPC component bonded to the analog circuit component substrate. The HPC component includes at least one HPC metal component disposed within an HPC insulative layer, at least one bond pad, at least one bond pad via connecting the at least one bond pad and the at least one HPC metal component, and an HPC substrate. Additionally, the semiconductor device includes a DTC component bonded to the HPC substrate, and which includes a DTC die disposed in a DTC substrate.

Growing community of inventors

Taichung, Taiwan

Sheng Kai Yeh