Mosel Vitelic Corporation

Sheng-Kai Chang

Shih-Chi Lai

Kuang-Yung Wu

Shih-Tung Lan

A gas ring with curved surface on the edge of the gas-guiding trench of a gas ring apparatus is disclosed. The apparatus includes a ring-shaped body located on bottom of an etch chamber, wherein the ring-shaped body has a ring-shaped gas-guiding trench formed on the bottom surface and inside of the ring-shaped body, and wherein the intersection of sidewall of the ring-shaped gas-guiding trench and the bottom surface of the ring-shaped body has a curved bending surface. At least one gas hole extends from the top surface of the ring-shaped body to the ring-shaped gas-guiding trench. The apparatus also includes a first ring-shaped seal and a second ring-shaped seal situated on the bottom surface of the ring-shaped body. A blocking layer is formed to cover the surface of the ring-shaped body.

Growing community of inventors

Ku-Keng Hsiang, Taiwan

Sheng-Kai Chang