Taiwan Semiconductor Manufacturing Comp. Ltd.

Sheng He Huang

Chung-Pin Chou

Jun Xiu Liu

Yan-Cheng Chen

Sheng-Ching Kao

Hsuan-Chia Kao

Shiue-Ming Guo

In a method of inspection of a semiconductor substrate a first beam of light is split into two or more second beams of light. The two or more second beams of light are respectively transmitted onto a first set of two or more first locations on top of the semiconductor substrate. In response to the transmitted two or more second beams of light, two or more reflected beams of light from the first set of two or more first locations are received. The received two or more reflected beams of light are detected to generate two or more detected signals. The two or more detected signals are analyzed to determine whether a defect exists at the set of the two or more first locations.

Growing community of inventors

Taichung, Taiwan

Sheng He Huang