Crystal Photonics, Inc.

Shen Jen

Bruce H T Chai

Mitch M C Chou

Haihong Qiu

Bruce Chai

Yi-Ting Fei

This invention is related to material for use as an ultraviolet (UV) optical element and particularly for use as a 193 nm immersion lens element. The material for use as a UV optical element includes a Lithium Magnesium Aluminate (LMAO) body. The specific compound for this application is the disordered lithium magnesium spinel, having the general composition of LiMgAlOwhere x=0 to 1 as the high-index UV transparent material for immersion lithography. The LMAO body may include a disordered spinel, such as, for example, a single crystal that may be cubic in symmetry, optically isotropic, and having cation disorder within the structure to reduce the intrinsic birefringence (IBR). The LMAO body has certain desired material properties and may be readily made in relatively large sizes suitable for use as the UV optical element for photolithography.

High-index UV optical materials for immersion lithography

An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A BC D E wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure.

Electronic device including langasite structure compound and method for making such devices

An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A BC D E , wherein A is calcium, B is niobium or tantalum, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure.

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Lake Mary, FL, United States of America

Shen Jen