Wisconsin Alumni Research Foundation

University of Hamburg

Shelley Scott

Max G Lagally

Abhishek Bhat

Robert H Blick

Frank Steele Flack

Thomas Francis Kuech

Donald E Savage

Yingxin Guan

Xiaorui Cui

Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.

Integration of semiconductor membranes with piezoelectric substrates

A transducer supported by the eardrum provides a piezoelectric material exchanging energy with the eardrum through a nanoscale membrane, the latter serving to boost the coupling between the piezoelectric material and the eardrum.

Eardrum transducer with nanoscale membrane

High-quality, single-crystalline silicon-germanium (SiGe) having a high germanium content is provided. Layers of the high-quality, single-crystalline silicon-germanium can be grown to high sub-critical thicknesses and then released from their growth substrates to provide SiGefilms without lattice mismatch-induced misfit dislocations or a mosaic distribution of crystallographic orientations.

High-quality, single-crystalline silicon-germanium films

The present nanomembrane structures include a multilayer film comprising a single-crystalline layer of semiconductor material disposed between two other single-crystalline layers of semiconductor material. A plurality of holes extending through the nanomembrane are at least partially, and preferably entirely, filled with a filler material which is also a semiconductor, but which differs from the nanomembrane semiconductor materials in composition, crystal orientation, or both.

Growing community of inventors

Madison, WI, United States of America

Shelley Scott