Apple Inc.

Applied Materials, Inc.

Waymo LLC

Hewlett-packard Development Company, L.p.

University of Louisville Research Foundation, Inc.

University of Kentucky Research Foundation

Shashank Sharma

Scott Wallace Miller

Douglas Stuart Brodie

Alfred N Mireault

Aurelien R Hubert

Theodore I Kamins

Nicholas D Smyth

Abhilash J Mayur

Mahendra Kumar Sunkara

Wei Liu

Matthew Emanuel Last

Norman L Tam

Brad Vaughn Johnson

Simon S Lee

Steven Webster

Matthew Spuller

Xinming Zhang

Shih-Yuan Wang

Alexandre M Bratkovski

Gaurav Thareja

Qiang Yang

Johanes S Swenberg

Benjamin Frevert

Houda Graoui

Shankar Muthukrishnan

Rummel R Adriano

Schubert S Chu

Duncan R Stewart

M Saif Islam

Patricia M Liu

Ralph Hamilton Shepard

Xuebin Li

Diwakar N Kedlaya

Rene George

Zachary W Birnbaum

Prasanna Kalkura

Paul Schaefer

Richard Stanley Williams

Joseph Michael Ranish

Aaron Muir Hunter

Philip John Kuekes

Xianmin Tang

Wei Guang Wu

Siddarth A Krishnan

Kelvin Chan

Avgerinos V Gelatos

Wei E Wu

Karthik Janakiraman

Rui Cheng

Wolfgang R Aderhold

Zhebo Chen

Jingmei Liang

Martin Jay Seamons

Praket Prakash Jha

Sanjay S Natarajan

Jianxin Lei

Zubin Huang

Nobuhiko P Kobayashi

Takashi Kuratomi

Dongming Iu

DongQing Li

Krishna Nittala

Deepak Kamalanathan

Burtron H Davis

Zeqiong Zhao

Yong Sun

Keyvan Kashefizadeh

Uschi M Graham

Matthew Rinehart

Hari Chandrasekaran

Hongwei Li

Kai Ng

Gautam K Hemani

Eric Rieske

Nicolas Louis Gabriel Breil

Amir A Yasseri

Michael P Kamp

Ria Someshwar

Sreeram Vaddiraju

Alicia J Lustgraaf

Brett Spaulding

Pradeep Sampath Kumar

Various embodiments include a camera with folded optics and lens shifting capabilities. Some embodiments include voice coil motor (VCM) actuator arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Some embodiments include suspension arrangements. The suspension arrangements may include leaf springs attached to a carrier structure for the lens.

Camera with folded optics having moveable lens

The present disclosure provides systems and methods for processing channel structures of substrates that include positioning the substrate in a first processing chamber having a first processing volume. The substrate includes a channel structure with high aspect ratio features having aspect ratios greater than about 20:1. The method includes forming a silicon-containing layer over the channel structure to a hydrogen-or-deuterium plasma in the first processing volume at a flow rate of about 10 sccm to about 5000 sccm. The substrate is maintained at a temperature of about 100° C. to about 1100° C. during the exposing, the exposing forming a nucleated substrate. Subsequent to the exposing a thermal anneal operation is performed on the substrate.

System and method for radical and thermal processing of substrates

Some embodiments include a camera voice coil motor (VCM) actuator configured to shift a lens and/or an image sensor along multiple axes. The VCM actuator may include a bottom flexure and a top flexure that connect one or more dynamic members to one or more static members. The VCM actuator may include stationary magnets and coils held by dynamic members. In some cases, the VCM actuator may be configured to move the image sensor along an optical axis, to move the image sensor in directions orthogonal to the optical axis, and/or to tilt the image sensor relative to the orthogonal axis. In some examples, the VCM actuator may be configured to move the image sensor in directions orthogonal to the optical axis, to move the lens along the optical axis, and/or to tilt the lens relative to the optical axis.

Camera actuator for lens and sensor shifting

Embodiments herein are directed to methods of forming titanium nitride films suitable for use as a bulk fill material for conductive features in a semiconductor device, such as for capacitor electrodes and/or buried word lines in a dynamic random-access memory (DRAM) device. In one embodiment, a method of forming conductive features in a semiconductor device is provided. The method includes thermally treating a substrate surface comprising at least portions of a titanium nitride layer in the presence of hydrogen radicals. Thermally treating the substrate includes positioning the substrate in a processing volume of a processing chamber, heating the substrate to a treatment temperature of more than about 250° C., generating the hydrogen radicals using a remote plasma source fluidly coupled to the processing volume, and maintaining the substrate at the treatment temperature while concurrently exposing the at least portions of the titanium nitride layer to the generated hydrogen radicals. Here, the substrate includes a field surface having a plurality of openings formed therein and the at least portions of the titanium nitride layer are disposed in the plurality of openings.

Treatment methods for titanium nitride films

Various embodiments include a camera with folded optics and lens shifting capabilities. In some examples, a folded optics arrangement of the camera may include one or more lens elements and light path folding elements (e.g., prisms). Some embodiments include voice coil motor (VCM) actuator arrangements, carrier arrangements, and/or suspension arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Furthermore, some embodiments include position sensor arrangements for position sensing with respect to AF and/or OIS movement.

Folded camera with actuator for moving optics

A planar sensor array, like an imaging sensor array, can be mounted to a ceramic circuit board to provide improved mechanical stability and heat dissipation. Embodiments herein provide improvements to such assemblies by providing two or more recesses in the ceramic circuit board opposite the sensor array. Electronic components can be placed in these recesses, reducing the overall size and moment of inertia of the sensor assembly relative to placement on the same side of the ceramic circuit board as the sensor array. Placing the electronics in the two or more recesses allows for simplified mounting of the assembly to heat sinks, flexible circuit boards, or other elements. The two or more recesses are separated by a stiffening cross-brace portion of the ceramic circuit board that enhances the mechanical strength of the ceramic circuit board.

Compact ceramic package with rear cavities

The present disclosure relates to optical systems, vehicles, and methods for providing improved mechanical performance of a camera and corresponding optical elements. An example optical system includes an outer housing and an inner support member. The optical system also includes an optical window coupled to the outer housing and the inner support member. The optical window is configured to be temperature-controllable. The optical system also includes a camera coupled to the inner support member. The camera is optically coupled to the optical window. Additionally, the outer housing, the optical window, and the camera are configured to be impact resistant.

Impact resistant heated window mount for thermal camera

Some embodiments include a camera voice coil motor (VCM) actuator that includes an additive coil structure for shifting a lens along one or multiple axes. The additive coil structure may include a base portion configured to couple with a lens carrier and at least partially surround a perimeter of the lens carrier. In various examples, the additive coil structure may include folded portions that individually include a respective coil that is located proximate a respective magnet. According to various embodiments, the additive coil structure may be formed using an additive process.

Additive coil structure for voice coil motor actuator

In some embodiments, a camera includes a lens assembly in a lens carrier, an image sensor for capturing a digital representation of light transiting the lens, and a voice coil motor. In some embodiments, the voice coil motor includes a spring suspension assembly for moveably mounting the lens carrier to an actuator base, a plurality of permanent magnets mounted to the actuator base through a magnet holder assembly and a focusing coil fixedly mounted to the lens carrier and mounted to the actuator base through the suspension assembly. In some embodiments, the permanent magnets each generate a magnetic field of a respective permanent magnet field strength, and the magnet holder assembly generates a holder magnetic field of a holder magnetic field strength.

Camera actuator with magnet holder having magnetic field

A camera includes a camera focus adjustment device, a lens, and an image sensor coupled to the camera focus adjustment device. The camera focus adjustment device includes a flexure structure. The flexure structure includes an outer framework of structural members continuously interconnected by flexure notch hinges. The flexure structure also includes two inner structural members oriented in parallel and extending from the outer framework of structural members. A gap is between the two inner structural members. The camera focus adjustment device also includes a piezoelectric material within the gap and a pair of wedges within the gap. The pair of wedges is affixed to the piezoelectric material and to one inner structural member of the two inner structural members. Based on temperature-based piezoelectric activity associated with the piezoelectric material, the camera focus adjustment device is operable to move the image sensor relative to the lens.

Flexure amplified piezo actuator for focus adjustment

Various embodiments include a camera with a folded optics arrangement and include a voice coil motor (VCM) actuator assembly to provide autofocus (AF) and/or optical image stabilization (OIS) movement. The camera with folded optics and the associated VCM actuator assembly have a first rotational normal mode of free vibration such that lenses of the camera rotate about an optical axis of the camera such that the rotational motion in the first rotational mode of free vibration is invisible from a perspective of an image sensor of the camera.

Folded optics camera and actuator assembly

Example embodiments relate to enhanced depth of focus cameras using variable apertures and pixel binning. An example embodiment includes a device. The device includes an image sensor. The image sensor includes an array of light-sensitive pixels and a readout circuit. The device also includes a variable aperture. Additionally, the device includes a controller that is configured to cause: the variable aperture to adjust to a first aperture size when a high-light condition is present, the variable aperture to adjust to a second aperture size when a low-light condition is present, the readout circuit to perform a first level of pixel binning when the high-light condition is present, and the readout circuit to perform a second level of pixel binning when the low-light condition is present. The second aperture size is larger than the first aperture size. The second level of pixel binning is greater than the first level of pixel binning.

Enhanced depth of focus cameras using variable apertures and pixel binning

One example system comprises an active sensor that includes a transmitter and a receiver, a first camera that detects external light originating from one or more external light sources to generate first image data, a second camera that detects external light originating from one or more external light sources to generate second image data, and a controller. The controller is configured to perform operations comprising determining a first distance estimate to a first object based on a comparison of the first image data and the second image data, determining a second distance estimate to the first object based on active sensor data, comparing the first distance estimate and the second distance estimate, and determining a third distance estimate to a second object based on the first image data, the second image data, and the comparison of the first and second distance estimates.

LIDAR based stereo camera correction

In some embodiments, a camera actuator includes an actuator base, an autofocus voice coil motor, and an optical image stabilization voice coil motor. In some embodiments, the autofocus voice coil motor includes a lens carrier mounting attachment moveably mounted to the actuator base, a plurality of shared magnets mounted to the base, and an autofocus coil fixedly mounted to the lens carrier mounting attachment for producing forces for moving a lens carrier in a direction of an optical axis of one or more lenses of the lens carrier. In some embodiments, the optical image stabilization voice coil motor includes an image sensor carrier moveably mounted to the actuator base, and optical image stabilization coils moveably mounted to the image sensor carrier within the magnetic fields of the shared magnets, for producing forces for moving the image sensor carrier in a plurality of directions orthogonal to the optical axis.

Optical image stabilization with voice coil motor for moving image sensor

Various embodiments include a camera voice coil motor (VCM) actuator configured to shift an image sensor along multiple axes. Some embodiments include a magnet and coil arrangement. Some embodiments include a position sensing arrangement. Some embodiments include a flexure arrangement. Some embodiments include a coil structure and coil carrier assembly.

Camera with image sensor shifting

Growing community of inventors

Mountain View, CA, United States of America

Shashank Sharma