Tower Semiconductor Ltd.

Sharon Levin

Sagy Levy

Shye Shapira

Ira Naot

David Mistele

Robert J Strain

Zachary K Lee

Alexey Heiman

Yossi Netzer

Noel Berkovitch

Zohar Shaked

Allon Parag

Alexei Heiman

Gal Fleishon

Yosef Avrahamov

Johnatan A Kantarovsky

Ira Noat

Einat Ophir Arad

Eran Lipp

Jolly Gurvinder

An SOI IC includes a polysilicon/silicon plug extending through the buried insulation layer between a P-type handle layer and a P-type device layer. An N-type well region is formed in the device layer over the polysilicon/silicon plug, and then a high-voltage (HV) device is formed in the well region such that part of its drift region is located over the polysilicon/silicon plug. Doping of the well region, the polysilicon/silicon plug and the handle layer is coordinated to form a P-N junction diode that couples the HV device, by way of the polysilicon/silicon plug, to a ground potential applied to the handle layer, thereby increasing the HV device's breakdown voltage by expanding its depletion region to include the handle layer. The polysilicon/silicon plug grows in holes formed through the insulation layer during the epitaxial silicon growth process used to form the device layer.

Method of forming high-voltage silicon-on-insulator device with diode connection to handle layer

Some demonstrative embodiments include a Metal-Oxide-Semiconductor (MOS) transistor including a multi-split gate. For example, an Integrated Circuit (IC) may include at least one MOS transistor, the MOS transistor may include a source; a drain; a body; and a multi-split gate including a control gate component configured to control conductivity of the MOS transistor, and at least first and second field plate gate components, the first field plate gate component is electrically isolated from the second field plate gate component, the first and second field plate gate components are electrically isolated from the control gate.

Apparatus of a metal-oxide-semiconductor (MOS) transistor including a multi-split gate

A semiconductor die that may include a substrate; an epitaxial layer; a metal layer; a first transistor; and a metal via that surrounds the first transistor, extends between the metal layer and the substrate, and penetrates the substrate.

Semiconductor die with a metal via

A laterally diffused metal oxide semiconductor (LDMOS) device that may include an oxide region that comprises a bottom surface; a drain that is positioned between a left drift region and a right drift region and below the bottom surface; wherein the oxide region further comprises a first sloped surface and a second sloped surface; wherein a first angle between the first sloped surface and the bottom surface does not exceed twenty degrees; and wherein a second angle between the second sloped surface and the bottom surface of the oxide region does not exceed twenty degrees.

LDMOS device having a low angle sloped oxide

A double-RESURF LDMOS transistor has a gate dielectric structure including a shallow field 'bump' oxide region and an optional raised dielectric structure that provides a raised support for the LDMOS transistor's polysilicon gate electrode. Fabrication of the shallow field oxide region is performed through a hard 'bump' mask and controlled such that the bump oxide extends a minimal depth into the LDMOS transistor's drift (channel) region. The hard &#x201c;bump&#x201d; mask is also utilized to produce an N-type drift (N-drift) implant region and a P-type surface effect (P-surf) implant region, whereby these implants are &#x201c;self-aligned&#x201d; to the gate dielectric structure. The N-drift implant is maintained at Vdd by connection to the LDMOS transistor's drain diffusion. An additional Boron implant is utilized to form a P-type buried layer that connects the P-surf implant to the P-body region of the LDMOS transistor, whereby the P-surf implant is maintained at 0V.

Double-resurf LDMOS with drift and PSURF implants self-aligned to a stacked gate 'bump' structure

A vertical DMOS device implements one or more deep silicon via (DSV) plugs, thereby significantly reducing the layout area and on-resistance (RDS) of the device. The DSV plugs extend through a semiconductor substrate to contact a conductively doped buried diffusion region, which forms the drain of the vertical DMOS device. Methods for fabricating the vertical DMOS device are compatible with conventional sub-micron VLSI processes, such that the vertical DMOS device can be readily fabricated on the same integrated circuit as CMOS devices and analog devices, such as lateral double-diffused MOS (LDMOS) devices.

Deep silicon via as a drain sinker in integrated vertical DMOS transistor

According to an embodiment of the invention there may be provided a die that may include a first capacitor layer that comprises (a) a first capacitor conductive plate, and (b) a first capacitor layer dielectric material that partially surrounds the first capacitor conductive plate; a first conductor; an intermediate metal layer that comprises (a) an intermediate metal layer conductor that is made of Copper, and (b) an intermediate metal layer dielectric material that partially surrounds the intermediate metal layer conductor; wherein the first conductor is positioned between a substrate of the die and the intermediate metal layer; a redistribution layer that comprises (a) a redistribution layer conductor that is electrically coupled to an interface pad of the die, (b) a second capacitor conductive plate, and (c) a redistribution layer dielectric material that partially surrounds the redistribution layer conductor and the second capacitor conductive plate; wherein a certain portion of the intermediate metal layer dielectric material is positioned between the first and second capacitor conductive plates; wherein at least the certain portion of the intermediate metal layer dielectric material, the first capacitor conductive plate and the second capacitor conductive plate form a high voltage capacitor; and wherein the intermediate metal layer conductor is configured to supply power to a group of transistors of the die while the first conductor is configured to supply power only to a sub-group of the transistors of the die.

Die including a high voltage capacitor

According to an embodiment of the invention there may be provided a die that may include (a) a first region of a first type; (b) a first conductor that contacts the first region; (c) a substrate having a substrate portion of the first type; wherein the substrate portion contacts the first region; an intermediate region of a second type; wherein the first type and the second type are selected from an n-type semiconductor and a p-type semiconductor; wherein the first type differs from the second type; (d) a second region of the second type; (e) a second conductor that contacts the second region; (f) a third region of the second type; (g) a third conductor that contacts the third region; (h) a fourth region of the first type; wherein the third region contacts the fourth region and does not contact the intermediate region; (i) a fourth conductor that contacts the intermediate region to form a first Schottky diode. A doping concentration of the intermediate region may be lower that a doping concentration of each one of the second region and the third region. A doping concentration of the substrate portion may be lower than a doping concentration of the first region. The third and fourth conductors may be electrically coupled to each other.

Die including a Schottky diode

A low Rdson LDMOS transistor having a shallow field oxide region that separates a gate electrode of the transistor from a drain diffusion region of the transistor. The shallow field oxide region is formed separate from the field isolation regions (e.g., STI regions) used to isolate circuit elements on the substrate. Fabrication of the shallow field oxide region is controlled such that this region extends below the upper surface of the semiconductor substrate to a depth that is much shallower than the depth of field isolation regions. For example, the shallow field oxide region may extend below the upper surface of the substrate by only Angstroms or less. As a result, the current path through the resulting LDMOS transistor is substantially unimpeded by the shallow field oxide region, resulting in a low on-resistance.

LDMOS transistor having elevated field oxide bumps and method of making same

A double-RESURF LDMOS fabrication method utilizes a shared mask to form separately patterned N+ buried layer (NBL) and P+ buried layer (PBL) regions. The mask includes two opening types (e.g., large and small), and the P-type and N-type implant materials are separately directed onto the mask at different implant angles, such that the N-type implant passes through both opening types to form a first pattered implant region in both a first region and a surrounding second region, and such that the P-type implant material passes only through the larger openings and forms a second pattered implant region only in the first substrate portion. An optional epitaxial layer is deposited over the substrate and annealed to form the separately patterned PBL and NBL in the epitaxial layer, where a portion of the PBL diffuses above the NBL and forms a P-surf region below the LDMOS's N-drift region.

Double RESURF LDMOS with separately patterned P+ and N+  buried layers formed by shared mask

An integrated circuit includes both LDMOS devices and one or more low-power CMOS devices that are concurrently formed on a substrate using a deep sub-micron VLSI fabrication process. The LDMOS polycrystalline silicon (polysilicon) gate structure is patterned using a two-mask etching process. The first etch mask is used to define a first edge of the gate structure located away from the deep body/drain implant. The second etch mask is then used to define a second edge of the gate structure, and the second etch mask is then retained on the gate structure during subsequent formation of the deep body/drain implant. After the deep implant, shallow implants and metallization are formed to complete the LDMOS device.

Self-aligned LDMOS fabrication method integrated deep-sub-micron VLSI process, using a self-aligned lithography etches and implant process

A Schottky diode exhibiting low series resistance is efficiently fabricated using a substantially standard CMOS process flow by forming the Schottky diode using substantially the same structures and processes that are used to form a field effect transistor (FET) of a CMOS IC device. Polycrystalline silicon, which is used to form the gate structure of the FET, is utilized to form an isolation structure between the Schottky barrier and backside structure of the Schottky diode. Silicide (e.g., cobalt silicide (CoSi)) structures, which are utilized to form source and drain metal-to-silicon contacts in the FET, are used to form the Schottky barrier and backside Ohmic contact of the Schottky diode. Heavily doped drain (HDD) diffusions and lightly doped drain (LDD) diffusions, which are used to form source and drain diffusions of the FET, are utilized to form a suitable contact diffusion under the backside contact silicide.

Gate defined Schottky diode

A Schottky diode is formed on an isolated well (e.g., a P-well formed in a buried N-well), and utilizes cobalt silicide (CoSi) structures respectively formed on heavily doped and lightly doped regions of the isolated well to provide the Schottky barrier and backside (ohmic) contact structures of the Schottky diode. The surrounding buried N-well is coupled to a bias voltage. The Schottky barrier and backside contact structures are separated by isolation structures formed using polycrystalline silicon, which is used to form the gate structure of CMOS FETs, in order to minimize forward resistance. Heavily doped drain (HDD) diffusions and lightly doped drain (LDD) diffusions, which are used to form source and drain diffusions of the FET, are utilized to form a suitable contact diffusion under the backside contact silicide.

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Haifa, Israel

Sharon Levin