Intel Corporation

Shardul Wadekar

Travis W LaJoie

Abhishek Anil Sharma

Huiying Liu

Moshe Dolejsi

Deepyanti Taneja

Tarannum Tiasha

Yue Liu

Daniel J Schinke

Vladimir Nikitin

James O'Donnell

An integrated circuit includes a first layer, and a second layer above the first layer. A third layer is between a first section of the first layer and a first section of the second layer. A fourth layer is laterally adjacent to the third layer, the fourth layer between a second section of the first layer and a second section of the second layer. In an example, a first dielectric material of the third layer is different (e.g., one or both of compositionally different and structurally different) from a second dielectric material of the fourth layer. In an example, the third and fourth layers are etch stop layers. In some cases, the third and fourth layers are coplanar with each other with respect to their top surfaces, or their bottom surfaces, or both their top and bottom surfaces.

Hybrid etch stop layers

Growing community of inventors

Hillsboro, OR, United States of America

Shardul Wadekar