Rodel Holdings, Inc.

Rodel Inc.

Sharath D Hosali

Lee Melbourne Cook

Jiun-Fang Wang

Anantha R Sethuraman

Michael R Oliver

A method is provided for polishing a composite comprised of silica and silicon nitride wherein a polishing composition is used comprising: an aqueous medium, abrasive particles, a surfactant, an organic polymer viscosity modifier which increases the viscosity of the composition, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has two or more functional groups each having a dissociable proton, the functional groups being the same or different.

Composition and method for polishing a composite of silica and silicon nitride

A composition is provided for polishing a composite comprised of silica and silicon nitride comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has two or more functional groups each having a dissociable proton, the functional groups being the same or different.

Composition and method for polishing a composite of silica and silicon

Composition for polishing a composite of silica and silicon nitride

A composition is provided for polishing a composite comprised of silica and silicon nitride comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has has two or more functional groups each having a dissociable proton, the functional groups being the same or different.

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Newark, DE, United States of America

Sharath D Hosali