Touchdown Technologies, Inc.

Shaoning Lu

Nim Tea

Melvin Khoo

A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test ('DUT') is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.

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Monrovia, CA, United States of America

Shaoning Lu