Industrial Technology Research Institute

Shang-Ping Ying

Hung-Lieh Hu

Ya-Hui Chiang

Tzung-Te Chen

Yi-Keng Fu

Hsun-Chih Liu

Chiu-Ling Chen

Chien-Ping Wang

An apparatus for measuring of a curvature of a thin film, is adapted to measure the curvature of a thin-film. The apparatus includes a light emitting module, a first optical module, a second optical module, a third optical module, an image capture module, and an image analysis module. The light emitting module emits at least one line laser as an incident light whose cross-sectional shape is a geometric picture formed of lines. The incident light is transmitted through a first optical path formed of the first optical module, and is directed to incident the thin film by the second optical module. The reflected light is reflected by the thin film go through the second optical path, and is directed to transmit through the third optical path by the third optical module, and then is captured by the capture module to form a second geometric picture.

Thin-film curvature measurement apparatus and method thereof

A bar-like side-emitting light guide suitable for re-directing an incident light beam such that the light beam emerges from each side of the structure. The guide structure includes a light guiding bar having an upper surface and a lower surface and extending along a longitudinal direction. On a cross-sectional plane of the light guiding bar, there is a first line interval on the upper surface. A second line interval, a third line interval and a coupling part are located at the lower surface. The coupling part couples with the second line interval and the third line interval. The distance from the lower surface of the light guiding bar to a reference plane of the upper surface varies such that the thickness gradually decreases from the coupling part to the sides. In addition, a planar light source module can be constructed by arranging the foregoing light guiding bars in parallel.

Structure of bar-like side-emitting light guide and planar light source module

Growing community of inventors

Zhubei, Taiwan

Shang-Ping Ying