Samsung Sdi Co., Inc.

E.i. Dupont De Nemours and Company

Shang-Hyeun Park

Jeong-hee Lee

Tae-Won Jeong

Hang-Woo Lee

Young-Hwan Kim

Sang-Hyun Lee

Jeong-na Heo

Jung-Na Heo

You-jong Kim

Won-Seok Kim

A method of forming a stacked structure in an electronic device, where a photoresist for performing multi-patterning processes is used. Also, a method of manufacturing a FED in which different structures can be multi-patterned by using a single photoresist mask. The photoresist has a solubility to a solvent by heat-treatment after exposure, and a complicated structure can be formed using the photoresist.

Method of forming stack layer and method of manufacturing electronic device having the same

In a method of manufacturing a field emitter, a patterned conductive layer is formed on a substrate, an upper surface of the conductive layer is coated with a mixture of a field emission material and metal powder, the mixture is thermally treated to improve adhesion of the mixture to the conductive layer, and a field emission material and a metal deposited on a portion of the substrate other than the conductive layer are removed. Accordingly, the lifespan and field emission characteristic of the field emitter are greatly improved, and a large area field emitter having excellent characteristics that cannot be realized in the conventional art is fabricated.

Method of manufacturing field emitter

A method of forming emitters and a method of manufacturing a Field Emission Device (FED) using the method includes: forming a volume-changeable structure on an electrode, the volume-changeable structure composed of a polymer which reversibly swells and shrinks in response to an external stimulus; injecting an electron-emitting material into the volume-changeable structure; aligning the electron-emitting material; and removing the polymer to form the emitters.

Method of forming emitters and method of manufacturing field emission device (FED)

A method of manufacturing a field emission device (FED) using a photoresist for performing multi-patterning processes, whereby different structures can be multi-patterned using a single photoresist mask. The photoresist has a solubility to a solvent by post-exposure heat-treatment, and a complicated structure can be formed using the photoresist.

Method of manufacturing field emission device

A method of forming carbon nanotube emitters and a method of manufacturing an FED using such carbon nanotube emitters includes: forming a carbon nanotube layer on a substrate on which a plurality of electrodes are formed, coating a photoresist on the carbon nanotube layer, patterning the photoresist such that the photoresist only remains above the electrodes, removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as a etch mask, and removing the photoresist pattern and forming the carbon nanotube emitters on the electrodes.

Method of forming carbon nanotube emitters and field emission display (FED) including such emitters

A method of manufacturing a field emission device. In the method, emitters are formed using a lift-off process, and an isolation layer is formed between a sacrificial layer for patterning the emitters and emitter materials. The isolation layer prevents the sacrificial layer from reacting on the emitter materials to facilitate the lift-off process. Thus, the field emission device, which uniformly emits light having a high brightness, can be obtained.

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Boryeong-si, South Korea

Shang-Hyeun Park