Zhejiang Lab

Shan Wang

Lei Zhang

Xiaoyu Wang

Qi Wang

The provided is an integrated multi-parameter (pressure, temperature, proximity) sensor based on optoelectronic integration and a fabrication method thereof. The sensor includes a flexible optical waveguide based on an optical mechanism and a flexible interdigitated electrode film based on an electrical mechanism and wound around the flexible optical waveguide, where the flexible optical waveguide is formed by inserting two optical fibers into a silicone tube, with the two optical fibers spaced apart from each other. The sensor achieves self-decoupled, crosstalk-free sensing of three parameters (pressure, temperature, proximity) through photoelectric-integrated multi-dimensional response signals. The sensor measures pressure via optical waveguide attenuation in the form of light intensity, measures temperature via the thermoresistive effect of the electrode in the form of resistance, and measures object proximity via the fringing electric field between the interdigitated electrodes in the form of capacitance.

Growing community of inventors

Hangzhou, China

Shan Wang