United Microelectronics Corp.

Shan-Shi Huang

Wen-Fang Lee

Chih-Chung Wang

Te-Yuan Wu

Ke-Feng Lin

Wei-Lun Hsu

Ching-Chung Yang

Chang-Po Hsiung

Ming-Tsung Lee

Shin-Hung Li

Ssu-I Fu

Chih-Kai Hsu

Yu-Hsiang Lin

Chin-Hung Chen

Shih-Yin Hsiao

Chia-Jung Hsu

Chiu-Te Lee

Chun-Ya Chiu

Nien-Chung Li

Tun-Jen Cheng

Ching-Wei Teng

Chung-I Huang

Fan-Chi Meng

Te-Chiu Tsai

Hung-Yi Tsai

A semiconductor structure comprises a substrate having a first well region of a first conductive type, a second well region of a second conductive type, and a junction between the first well region and the second well region. The first conductive type and the second conductive type are complementary. A plurality of first dummy structures and second dummy structures and at least a first active region are defined in the first well region by an isolation structure. The first dummy structures are adjacent to the junction and respectively comprise a first metal silicide region and a first doped region of the first conductive type and between the first metal silicide region and the first well region. The first dummy structures are between the second dummy structures and the junction. The second dummy structures respectively comprise a second metal silicide region that direct contacts the first well region.

Semiconductor structure

A semiconductor structure is disclosed. The semiconductor structure includes a substrate, a first well region of a first conductive type and a second well region of a second conductive type disposed in the substrate. The first conductive type and the second conductive type are complementary. A plurality of first dummy structures are disposed in the first well region and arranged along a junction between the first well region and the second well region. The first dummy structures respectively include a first conductive region and a first doped region disposed between the first conductive region and the first doped region.

A semiconductor device includes a semiconductor substrate, a recess, a first gate oxide layer, and a gate structure. The semiconductor substrate includes a first region and a second region adjacent to the first region. The recess is disposed in the first region of the semiconductor substrate, and an edge of the recess is located at an interface between the first region and the second region. At least a part of the first gate oxide layer is disposed in the recess. The first gate oxide layer includes a hump portion disposed adjacent to the edge of the recess, and a height of the hump portion is less than a depth of the recess. The gate structure is disposed on the first region and the second region of the semiconductor substrate, and the gate structure overlaps the hump portion of the first gate oxide layer in a vertical direction.

Semiconductor device and manufacturing method thereof

A method for forming gate structures for a HV device and a MV device is provided. The method includes forming a HV oxide layer on the substrate, covering a first region predetermined for forming the HV device. Further in the method, a dielectric mask is formed on a central portion of the HV oxide layer. A thermal oxidation process is performed to form a MV oxide layer on the substrate at a second region predetermined for forming the MV device, wherein peripheral portions of the HV oxide layer not covered by the dielectric mask grow thicker. The dielectric mask is removed. A conductive layer is formed over the substrate. The conductive layer, the HV oxide layer, the MV oxide layer are patterned to form the gate structures.

Method for forming gate structures in different operation voltages

A structure of ESD protection circuits on a BEOL layer includes a substrate. A plurality of interconnect layers and an inter-level dielectric layer are disposed on the substrate. The inter-level dielectric layer is disposed between the plurality of interconnect layers. The last layer of the interconnect layers comprises an I/O pad, a first pad and a second pad. A first diode and a second diode are disposed on the last layer of the inter-level dielectric layer, wherein the first diode electrically connects to the I/O pad and the first pad and the second diode electrically connects to the I/O pad and the second pad.

Structure of ESD protection circuits on BEOL layer

The present invention provides a method of fabricating a HV MOS transistor device, including forming a deep well in a substrate, and the deep well; forming a first doped region in the deep well, and the first doped region, wherein a doping concentration of the first doped region and a doping concentration of the deep well in at least one electric field concentration region has a first ratio, the doping concentration of the first doped region and the doping concentration of the deep well outside the electric field concentration region has a second ratio, and the first ratio is greater than the second ratio; and forming a high voltage well in the substrate, and forming a second doped region and a third doped region respectively in the deep well and in the high voltage well.

Method of fabricating high voltage metal-oxide-semiconductor transistor device

The present invention provides a high voltage metal-oxide-semiconductor transistor device including a substrate, a deep well, and a doped region. The substrate and the doped region have a first conductive type, and the substrate has at least one electric field concentration region. The deep well has a second conductive type different from the first conductive type. The deep well is disposed in the substrate, and the doped region is disposed in the deep well. The doping concentrations of the doped region and the deep well in the electric field have a first ratio, and the doping concentrations of the doped region and the deep well outside the electric field have a second ratio. The first ratio is greater than the second ratio.

High voltage metal-oxide-semiconductor transistor device and method of fabricating the same

The present invention provides a semiconductor device including a substrate, a deep well, a high-voltage well, and a doped region. The substrate and the high-voltage well have a first conductive type, and the deep well and the doped region have a second conductive type different from the first conductive type. The substrate has a high-voltage region and a low-voltage region, and the deep well is disposed in the substrate in the high-voltage region. The high-voltage well is disposed in the substrate between the high-voltage region and the low-voltage region, and the doped region is disposed in the high-voltage well. The doped region and the high-voltage well are electrically connected to a ground.

Semiconductor device

A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.

High voltage MOSFET device

The present invention provides a high-voltage semiconductor device including a deep well, a first doped region disposed in the deep well, a high-voltage well, a second doped region disposed in the high-voltage well, a first gate structure disposed on the high-voltage well between the second doped region and the first doped region, a doped channel region disposed in the high-voltage region and in contact with the second doped region and the deep well, and a third doped region disposed in the high-voltage well. The high-voltage well has a first conductive type, and the deep well, the first doped region, the second doped region, the doped channel region, and the third doped region have a second conductive type different from the first conductive type.

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Hsinchu, Taiwan

Shan-Shi Huang