Chinese Academy of Sciences

Shan Jiang

Wenhao Li

Zhaowu Liu

Wei Wang

Lin Liu

Yujia Sun

Wenyuan Zhou

Xu Liang

Siyu Jin

Heshig Bayan

Yubo Li

Shuo Li

Yanxiu Jiang

Xinyu Wang

Xingyu Zhu

Bayan Heshig

A method and a device for compensating a surface error of a holographic grating substrate based on scanning and exposure technology relates to a technical field of grating development. The method and the device adopt surface error compensation technology based on phase modulation of interference fringes of a scanning beam interference lithography system. The method and the device solve a poor grating diffraction wavefront quality caused by a surface processing error in a field of holographic grating research and improves full-aperture diffraction wavefront quality of a grating. Through coordination between feedback of the displacement measurement apparatus for the position of the two-dimensional worktop and the modulation of the scanning beam interference lithography system, full-aperture compensation of the surface error of the holographic grating substrate is achieved, which not only reduces processing accuracy requirements for the holographic grating substrate, but also improves the full-aperture diffraction wavefront quality of the grating.

Method and device for compensating surface error of holographic grating substrate

The present invention relates to the field of optics, in particular to a hybrid displacement measuring device, comprising a worktable to be measured, a grating ruler, a laser light source, a first beam splitting mirror, a first measuring assembly, and a second measuring assembly which comprises a first interferometer. A hybrid measuring approach that integrates grating and laser is proposed based on the advantages of the two measuring means. The grating ruler is used to perform long-distance measurement distal to the mirror, and the first interferometer is used to perform short-distance measurement proximal to the mirror, thereby solving the problem that it is difficult to guarantee both the range and the precision of displacement measurement of the worktable to be measured.

Hybrid displacement measuring device

Disclosed are a grating displacement measurement device and a grating displacement measurement method using a double-layer floating reading head, a medium, and an apparatus. A first measurement grating group is arranged on two first side edges of a substrate working surface, and a second measurement grating group is symmetrically arranged on both sides of a first reference line and close to a light-through member. A reading component is provided between a first measurement grating and a second measurement grating arranged on the same side, and each reading component is used to collect a first position information of the first measurement grating and a second position information of the second measurement grating. In the technical solutions, by using multi-channel position information output by two reading components in combination with a displacement solution algorithm.

Grating displacement measurement device and method using double-layer floating reading head, medium, and apparatus

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Changchun, China

Shan Jiang