Taiwan Semiconductor Manufacturing Comp. Ltd.

Shan-Hua Wu

Sheng-Liang Pan

Ruei-Hung Jang

Fei-Yun Chen

Chih-Lin Ying

Hung-Hsin Liu

Ming-Kuo Yu

Tien-Hsing Woo

Wei-Ya Wang

A method for use in manufacturing a microelectromechanical system, such as a reflective stealth mirror includes the steps of: forming an I-shape mirror structure; forming a spacer layer over the I-shape mirror structure; and patterning the spacer layer to form at least one spacer along a side of the I-shape mirror structure.

Spacer fabrication process for manufacturing reflective stealth mirrors and other MEMS devices

A method and apparatus for carrying out a method for thermophoretically removing particles from a particulate containing liquid the method including providing a heated turbulent flowing particulate contain liquid through a first conduit; redirecting a portion of the particulate containing liquid through a second conduit to provide laminar flow having a flow direction substantially parallel to the first conduit; forming a thermal gradient in said second conduit substantially perpendicular to the flow direction; concentrating particles in the particulate containing liquid in a portion of the second conduit aided at least in part by thermophoretic forces; and, separating the particulate containing liquid into at least a relatively concentrated particle containing portion and a relatively unconcentrated particle containing portion.

Thermophoretic particle removing system

Growing community of inventors

Hukou, Taiwan

Shan-Hua Wu