Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 131,906 patents)
1 patent:
1. 10418250 - Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method