Northrop Grumman Systems Corporation

Northrop Grumnian Systems Corporation

Shalini Gupta

Robert Samuel Howell

Eric Jonathan Stewart

Ronald G Freitag

Bettina A Nechay

Matthew Russell King

Harlan Carl Cramer

Justin Andrew Parke

Howell George Henry

Karen Marie Renaldo

Josephine B Chang

Ken Alfred Nagamatsu

A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.

Castellated superjunction transistors

A method of forming an integrated circuit can include forming a heterostructure over a substrate structure, wherein the given substrate structure comprises a given semiconductor material. The method can include etching a castellated channel region in an e-mode device area of the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, the ridge channels comprising another semiconductor material. The method can also include forming an isolation region on the heterostructure to electrically isolate the e-mode device area from a d-mode device area of the heterostructure. The method can further include forming a mask with an opening that defines a castellated gate opening overlying the castellated channel region and the mask defines an opening overlaying a single planar gate overlying the d-mode device area of the heterostructure. The method can also include performing a contact fill with conductive material to form a castellated gate contact.

Integrated enhancement mode and depletion mode device structure and method of making the same

A circuit is provided that includes a castellated channel device that comprises a heterostructure overlying a substrate structure, a castellated channel device area formed in the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, and a three-sided castellated conductive gate contact that extends across the castellated channel device area. The three-sided gate contact substantially surrounds each ridge channel around their tops and their sides to overlap a channel interface of heterostructure of each of the plurality of ridge channels. The three-sided castellated conductive gate contact extends along at least a portion of a length of each ridge channel.

A transistor device comprises a base structure and a superlattice of conducting channels overlying the base structure. The superlattice of conducting channels includes source and drain access regions spaced-apart from each other, a ledge between and spaced-apart from the source and drain access regions, and source-side alternating multichannel ridges and trenches that extend from the source access region to the ledge, each ridge having a topside and opposing sidewalls that each extend from the ledge to the source access region. The transistor device includes gate metal that covers each ridge continuously from the ledge to the source access region, such that the gate metal completely covers the topside of the ridge and edges of the conducting channels that intersect the sidewalls of the ridge.

Drain ledge for self-aligned gate and independent channel region and drain-side ridges for SLCFET

A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.

Methods of making multichannel devices with improved performance

Multichannel devices with improved performance and methods of making the same

Multichannel devices with improved performance

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Baltimore, MD, United States of America

Shalini Gupta