International Business Machines Corporation

Shakir A Abbas

Robert Charles Dockerty

Ingrid E Magdo

Narasipur G Anantha

Chi Shih Chang

Ronald W Knepper

Michael R Poponiak

Leo B Freeman, Jr

A self-aligned metal field effect transistor is described which achieves self-aligned metal to silicon contacts and submicron contact-to-contact and metal-to-metal spacing for field effect transistor integrated circuits. The insulation between the contacts and the metal is a pattern of dielectric material having a thickness dimension in the order of a micron or less. The metal and dielectric structure is substantially planar.

Self-aligned metal field effect transistor integrated circuit

A self-aligned metal process is described which achieves self-aligned metal silicon contacts and micron-to-submicron contact-to-contact and metal-to-metal spacing by use of the pattern of dielectric material having a thickness in the order of a micron or less. The pattern of recessed oxide isolation to device area is also self-aligned by this process. The process results in substantially planar integrated circuit structure. The process is applicable to either a bipolar integrated circuit either bipolar or MOS field effect transistor integrated circuits.

Method to fabricate stud structure for self-aligned metallization

A process is described which achieves self-aligned metal to silicon contacts and submicron contact-to-contact and metal-to-metal spacing for field effect transistors. The insulation between the contacts and the metal is dielectric material having a thickness dimension about a micron or less. The structure is substantially planar. The method for forming this structure involves providing a silicon body and then forming a first insulating layer on the silicon body. A layer of polycrystalline silicon is formed thereover. Openings are made in the layer by reactive ion etching which results in the structure having horizontal surfaces and vertical surfaces. The openings can be in either the areas designated to be the gate regions or a PN junction region of the field effect transistors in the integrated circuit. A second insulating layer is then formed on both the horizontal surfaces and vertical surfaces. Reactive ion etching of this second insulating layer moves the horizontal layers and provides a narrow dimensioned dielectric pattern of regions on the major surface of the silicon body. The gate dielectric is either formed hereat or PN junctions are fabricated by diffusion or ion implantation. The remaining polycrystalline layer is removed to leave the narrow regions on the major surface of the silicon body. A conductive layer is blanket deposited over the narrow dimensioned regions and areas in between to make contact to source/drain PN regions and form the gate electrodes.

Self-aligned metal process for field effect transistor integrated

A self-aligned metal process is described which achieves self-aligned metal to silicon contacts and sub-micron contact-to-contact and metal-to-metal spacing in the Integrated Injection Logic (I.sup.2 L) technology. The method involves providing a silicon body and then forming a first insulating layer on a major surface of the silicon body. The first insulating layer is removed in areas designated to contain integrated injection logic devices. A layer of highly doped polycrystalline silicon is formed thereover. The conductivity of the polycrystalline silicon is opposite to that of the silicon body. Openings are made in the polycrystalline silicon layer by reactive ion etching which results in the structure having substantially horizontal surfaces and substantially vertical surfaces. The openings are formed in areas designated to be the base of the lateral injector transistor of the integrated circuit. A second insulating layer is then formed on both the substantially horizontal surfaces and substantially vertical surfaces. Reactive ion etching of this second insulating layer substantially removes the horizontal layers and provides a narrow dimensioned dielectric pattern of regions on the major surface of the silicon body. The method continues using similar procedures to form the remaining elements of the I.sup.2 L device structure.

Self-aligned metal process for integrated injection logic integrated

An improved field effect transistor structure which reduces a leakage phenomenon, termed the 'sidewalk' effect, between the semiconductor substrate and a conductive silicon dioxide layer disposed over the substrate. The improvement comprises forming a layer of highly resistive, silicon dioxide or silicon oxynitride, which is between the conductive oxide and the silicon nitride layer which forms a portion of the gate insulator for the field effect transistor.

Field effect transistor structure and method for making same

An improved field effect transistor structure which reduces a leakage phenomenon, termed the 'sidewalk' effect, between the semiconductor substrate and a conductive silicon dioxide layer disposed over the substrate. The improvement comprises forming a layer of highly resistive silicon dioxide or silicon oxynitride, which is between the conductive oxide and the silicon nitride layer which forms a portion of the gate insulator for the field effect transistor.

Field effect transistor structure and method of making same

A process and the resulting structure for making metal oxide silicon field effect transistors and vertical bipolar transistors on the same semiconductor chip with the devices being dielectrically isolated from each other. The process does not require an epitaxial layer. The bipolar devices have utility as cross-chip or off-chip drivers or can be utilized for analog circuitry.

Process for making field effect and bipolar transistors on the same

A non-volatile memory cell that includes a Schottky barrier diode, located over a sub-diffused line or region formed within the substrate, acting as the control element. Information is stored in the device by introducing electrons into a nitride-oxide interface located at the perimeter of the Schottky barrier junction. Thus, the injected electrons are subject to trapping in the nitride-oxide layer, causing depletion in the epi region adjoining the diode interface, thereby influencing the current carrying state of the device.

Non-volatile Schottky barrier diode memory cell

A non-volatile read mostly memory cell in a monocrystalline semiconductor body wherein the sensing of the information is achieved by measuring the substrate current. The cell includes spaced source and drain regions, a gate dielectric layer capable of trapping a charge, a substrate contact electrode; a means to induce a trapped charge into the gate dielectric layer, including a means to apply a voltage larger than the threshold voltage to the gate electrode to form an inversion layer, and a means to apply a voltage to the drain electrode causing channel current to flow; a means to remove the trapped charge, including a means to apply a voltage equal to or exceeding the avalanche voltage to the drain to cause avalanching; a means to determine the presence or absence of a charge in the gate dielectric including a means to apply a voltage to the gate which is larger than the threshold voltage and a voltage to the drain that is significantly less than the avalanche voltage, and a means to determine the substrate current.

Non-volatile memory cell and array using substrate current

A process for forming holes with precisely controlled dimension and position in monocrystalline silicon wafers wherein the holes are fabricated with vertical sides. In the preferred process, both sides of the silicon body are masked, opposite registered openings made in the masking layers, an impurity introduced through the openings into the body forming low resistivity regions, the body anodically etched through the openings until a porous silicon region is formed completely through the body, and subsequently removing the resultant porous silicon region with a silicon etchant.

Process for forming apertures in silicon bodies

A semiconductor device has a heavily doped semiconductor substrate with a lightly doped epitaxial layer overlying a surface of the substrate and of the same conductivity type as the substrate. Electrically insulating barriers extend from at least the surface of the epitaxial layer into the substrate so as to electrically isolate non-common areas of each surface leakage sensitive device within the epitaxial layer from the non-common areas of adjacent surface leakage sensitive devices.

Growing community of inventors

Wappingers Falls, NY, United States of America

Shakir A Abbas