Applied Materials, Inc.

Shagun P Maheshwari

Tom K Cho

Yao-Hung Yang

Aniruddha Pal

Andrew S Yu

Siamak Salimian

Chien-Min Liao

King F Lee

Yu-Chi Yeh

A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.

Multinode multi-use O-ring and method for forming a seal

A method of reclaiming a used seal includes boiling the used seal in a liquid, and after boiling the used seal in the liquid, baking the used seal. The boiling the used seal may include boiling for a predetermined boiling time in the liquid, and the baking the used seal may include baking the used seal for a predetermined bake time at a predetermined temperature.

Method of reclaiming a seal

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San Jose, CA, United States of America

Shagun P Maheshwari