Commissariat a L'energie Atomique Et Aux Energies Alternatives

Sébastien Berard-Bergery

Stefan Landis

Ujwol Palanchoke

A method for manufacturing a multispectral filter for electromagnetic radiation including two colour filters each including a first reflective layer, a second reflective layer, a layer of dielectric material of Fabry-Perot cavity, the thickness of the dielectric layer of both colour filters being different and each of both filters facing a photoelectric transducer. The method includes depositing a resin layer onto a handle substrate, structuring the resin layer to obtain two resin patterns of different heights, at least one of the patterns having a maximum reference height; depositing a dielectric layer to form the dielectric patterns of the Fabry-Perot cavities and planarising; transferring the planarised face of the handle substrate to the upper face of a carrier substrate; removing the handle substrate and the resin and depositing a reflective layer onto the at least two dielectric patterns of Fabry-Perot cavity, forming the second reflective layer.

Method for manufacturing a multispectral filter for electromagnetic radiation

A multispectral filter matrix for an electromagnetic wave, the matrix including at least a first and a second optoelectronic element, each optoelectronic element including a colour filter and a photoelectric transducer facing the filter, each colour filter forming a Fabry-Perot cavity including a first reflective layer, a second reflective layer and a Fabry-Perot cavity layer of dielectric material between the first reflective layer and the second reflective layer, the layer of dielectric material including a lower surface, in contact with the first reflective layer; the lower surface being curved, an upper surface in contact with the second reflective layer, the upper surface being curved, the average thicknesses of the two layers of dielectric material of the two filters being different.

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Grenoble, France

Sébastien Berard-Bergery