Samsung Electronics Co., Ltd.

Seungwan Hong

Jaehoon Jang

Jaeduk Lee

Jin-Kyu Kang

Sejun Park

Okcheon Hong

Hyunseok Na

Heejueng Lee

Kyungjun Shin

Yunkyu Jung

A semiconductor memory device includes a stack structure including electrodes and insulating layers alternately stacked on a substrate, and a vertical channel structure penetrating the stack structure. The vertical channel structure includes a semiconductor pattern and a vertical insulating layer between the semiconductor pattern and the electrodes. The vertical insulating layer includes a charge storage layer, a filling insulating layer, and a tunnel insulating layer. The vertical insulating layer has a cell region between the semiconductor pattern and each electrode and a cell separation region between the semiconductor pattern and each insulating layer. A portion of the charge storage layer of the cell region is in physical contact with the tunnel insulating layer. The filling insulating layer is between the semiconductor pattern and a remaining portion of the charge storage layer of the cell region.

Three-dimensional semiconductor memory device

Example embodiments disclose a vertical memory device and method of manufacturing the same. The device may include a plurality of gate electrodes and a plurality of insulation patterns and a channel that penetrates a first gate electrode and a first insulation pattern. The device may have a charge storage structure including a tunnel insulation pattern, a charge trapping pattern, and a blocking pattern that are sequentially stacked from an outer sidewall of a channel. The device may have a buried pattern structure that is surrounded by the tunnel insulation pattern and the charge trapping pattern. The charge trapping pattern may include a first vertically sloped portion having a first thickness in the horizontal direction and a second vertically sloped portion having a second thickness in the horizontal direction, and the first thickness may be less than or equal to the second thickness.

Vertical memory devices with reduced gate electrode coupling and methods of manufacturing the same

Growing community of inventors

Suwon-si, South Korea

Seungwan Hong