Samsung Electronics Co., Ltd.

Samsung Display Co., Ltd.

Seungmin Song

Junggil Yang

Soojin Jeong

Dong Il Bae

Geumjong Bae

Junbeom Park

Joongshik Shin

Seungmin Lee

Hyun Joon Kim

Kangmin Kim

Bongseok Suh

Jonghyun Choi

Seonbeom Ji

Sanghoon Lee

Taehoon Yang

Kinyeng Kang

Sunwook Kim

Seunghwan Cho

Geunwon Lim

Yongjin Kwon

Jaehoon Shin

Beyounghyun Koh

Hyun Jung Kim

Seunghwan Lee

Hyeong Geun Park

Taeyong Kwon

Jongwon Kim

Joowon Park

Minseong Yi

Hyunmin Lee

Jaehyeoung Ma

Namhyun Lee

Hojong Kang

Sungsoo Ahn

Hyun Sook Kim

Jong Hyun Choi

Jongho Lee

Seung-Hwan Cho

Ki Nyeng Kang

Hyun Kyung Kim

Sung-Dae Suk

Juchan Park

Yong-Suk Tak

Gyung Soon Park

Taewoo Kim

Sungil Park

Junggun You

Jung Eun Hong

Hyojin Kim

Sung Gi Hur

Dongseog Eun

Myungil Kang

Doyoung Choi

Jinhyuk Kim

Kwangyoung Choi

Sae-Hee Ryu

Juri Lee

Hongik Son

Wooseok Park

Jinyool Kim

Kyeongjin Park

Seokhwa Jung

An integrated circuit device includes a channel area extending in a first horizontal direction, a gate cut structure having a tapered shape in which a horizontal width thereof decreases while extending from a lower side to an upper side in a vertical direction, and a pair of gate electrodes respectively having ends facing each other with the gate cut structure therebetween. The pair of gate electrodes may extend in a second horizontal direction intersecting with the first horizontal direction.

Integrated circuit devices

A semiconductor device includes an active region on a substrate; channel layers on the active region spaced apart from each other and including lower and upper channel layers; an intermediate insulating layer between an uppermost lower channel layer and a lowermost upper channel layer; a gate intersecting the active region and including a lower gate electrode surrounding the lower channel layers and an upper gate electrode surrounding the upper channel layers; an insulating pattern between the upper and lower gate electrodes on a side of the intermediate insulating layer; source/drain regions on at least one side of the gate, and including lower source/drain regions connected to the lower channel layers and upper source/drain regions connected to the upper channel layers; and a contact plug including a horizontal extension portion connected to the lower source/drain regions, and a vertical extension portion connected to the horizontal extension portion.

Semiconductor device

A semiconductor device may include first and second channel patterns on a substrate, first and second source/drain patterns in contact respectively with the first and second channel patterns, and first and second gate electrodes respectively overlapping the first and second channel patterns. The first gate electrode may include a first segment between first and second semiconductor patterns of the first channel pattern. The first segment may include a first convex portion protruding toward the first source/drain pattern. The second gate electrode may include a second segment between third and fourth semiconductor patterns of the second channel pattern. The second segment may include a concave portion recessed toward a center of the second segment.

Semiconductor devices

A vertical memory device includes gate electrode structures, channels, first to third division patterns, and a first support layer. The gate electrode structure includes gate electrodes stacked in a first direction, and extends in a second direction. The gate electrode structures are spaced apart from one another in a third direction. The first division pattern extends in the second direction between the gate electrode structures. The second and third division patterns are alternately disposed in the second direction between the gate electrode structures. The first support layer is on the gate electrode structures at substantially the same height as upper portions of the first and second division patterns, and contacts the upper portions of the first and second division patterns. The upper portions of the first and second division patterns are arranged in a zigzag pattern in the second direction in a plan view.

Vertical memory device with multiple support layers

A semiconductor device includes a channel pattern including a first semiconductor pattern and a second semiconductor pattern, which are sequentially stacked on a substrate, and a gate electrode that extends in a first direction and crosses the channel pattern. The gate electrode includes a first portion interposed between the substrate and the first semiconductor pattern and a second portion interposed between the first and second semiconductor patterns. A maximum width in a second direction of the first portion is greater than a maximum width in the second direction of the second portion, and a maximum length in the second direction of the second semiconductor pattern is less than a maximum length in the second direction of the first semiconductor pattern.

A memory device includes a substrate; a stacked structure including a plurality of gate layers and a plurality of interlayer insulating layers that are alternately stacked on the substrate in a vertical direction, the stacked structure including a row of cutouts, each of the cutouts extending in a first horizontal direction and being configured to cut the plurality of gate layers, the cutouts being apart from each other and arranged in a cell region of the stacked structure in the first horizontal direction; and a row of channel structures, the channel structures being arranged in the cell region in the first horizontal direction, each of the channel structures extending in the vertical direction to penetrate the plurality of gate layers.

Memory device

A semiconductor device includes an active pattern on a substrate, the active pattern extending in a first direction parallel to an upper surface of the substrate, a gate structure on the active pattern, the gate structure extending in a second direction parallel to the upper surface of the substrate and crossing the first direction, channels spaced apart from each other in a third direction perpendicular to the upper surface of the substrate, each of the channels extending through the gate structure, a source/drain layer on a portion of the active pattern adjacent the gate structure, the source/drain layer contacting the channels, and a sacrificial pattern on an upper surface of each of opposite edges of the portion of the active pattern in the second direction, the sacrificial pattern contacting a lower portion of a sidewall of the source/drain layer and including silicon-germanium.

A semiconductor chip includes a substrate, a source structure disposed on the substrate, and a support pattern disposed on the source structure. Each of the source structure and the support pattern includes polysilicon. The semiconductor chip further includes an electrode structure disposed on the support pattern, and a plurality of vertical structures extending vertically through the electrode structure. The electrode structure includes a lower electrode structure disposed on the support pattern and including a plurality of lower gate electrodes and a plurality of first insulating films, a second insulating film disposed on the lower electrode structure, and an upper electrode structure disposed on the second insulating film and including a plurality of upper gate electrodes and a plurality of third insulating films. The vertical structures contact the source structure above the source structure.

Semiconductor chip and semiconductor device including the same

A semiconductor device including a substrate including a division region extending in a first direction, first and second active patterns on the substrate with the division region interposed therebetween, the first and the second active patterns being spaced apart from each other in a second direction perpendicular to the first direction, gate electrodes extending in the first direction and crossing the first and second active patterns, a first channel pattern on the first active pattern, and a second channel pattern on the second active pattern may be provided. The smallest width of the first active pattern may be smaller than the smallest width of the second active pattern, in the first direction. An end portion of the first channel pattern adjacent to the division region may include a protruding portion extending in the first direction, and the protruding portion may have a triangle shape in a plan view.

Integrated circuit devices including a fin shaped active region and methods of forming the same are provided. The devices may include a fin shaped active region, a plurality of semiconductor patterns on the fin shaped active region, a gate electrode on the plurality of semiconductor patterns, and source/drain regions on opposing sides of the gate electrode, respectively. The gate electrode may include a main gate portion extending on an uppermost semiconductor pattern and a sub-gate portion extending between two adjacent ones of the plurality of semiconductor patterns. The sub-gate portion may include a sub-gate center portion and sub-gate edge portions. In a horizontal cross-sectional view, a first width of the sub-gate center portion in a first direction may be less than a second width of one of the sub-gate edge portions in the first direction.

Integrated circuit devices and methods of manufacturing the same

A semiconductor device including a substrate that includes first and second regions; a first active pattern on the first region, the first active pattern including first source/drain patterns and a first channel pattern between the first source/drain patterns; a second active pattern on the second region, the second active pattern including second source/drain patterns and a second channel pattern between the second source/drain patterns; and a first gate electrode on the first channel pattern and a second gate electrode on the second channel pattern, wherein a length of the first channel pattern is greater than a length of the second channel pattern, each of the first channel pattern and the second channel pattern includes a plurality of semiconductor patterns stacked on the substrate, and at least two semiconductor patterns of the first channel pattern are bent away from or toward a bottom surface of the substrate.

An integrated circuit includes a fin active region protruding from a substrate, a plurality of semiconductor patterns on an upper surface of the fin active region, a gate electrode that surrounds the plurality of semiconductor patterns and includes a main gate part on an uppermost one of the plurality of semiconductor patterns and sub gate parts between the plurality of semiconductor patterns, a spacer structure on a sidewall of the main gate part, and a source/drain region at a side of the gate electrode. The source/drain region is connected to the plurality of semiconductor patterns and contacts a bottom surface of the spacer structure. A top portion of the uppermost semiconductor pattern has a first width. A bottom portion of the uppermost semiconductor pattern has a second width smaller than the first width.

Integrated circuits and methods of manufacturing the same

A vertical memory device includes a gate electrode structure, a channel, an insulation pattern structure, an etch stop structure, and a through via. The gate electrode structure includes gate electrodes spaced apart from each other on a substrate in a first direction perpendicular to an upper surface of the substrate, and each of the gate electrodes extends in a second direction parallel to the upper surface of the substrate. The channel extends in the first direction through the gate electrode structure. The insulation pattern structure extends through the gate electrode structure. The etch stop structure extends through the gate electrode structure and surround at least a portion of a sidewall of the insulation pattern structure, and the etch stop structure includes a filling pattern and an etch stop pattern on a sidewall of the filling pattern. The through via extends in the first direction through the insulation pattern structure.

Vertical memory devices

Growing community of inventors

Hwaseong-si, South Korea

Seungmin Song