Samsung Display Co., Ltd.

Seungho Myoung

Gyoowan Han

Jaeseok Park

Alexander Voronov

Taekil Oh

Wonyong Kim

Jinhong Jeun

Jekil Ryu

Kyubum Kim

Minkyu Choi

Wonhee Oh

Do-sun Kim

Taekkyo Kang

An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.

Deposition mask manufacturing apparatus

A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.

Deposition mask manufacturing method and manufacturing apparatus thereof

A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.

Laser processing apparatus including a supply nozzle and a suction structure over a stage

An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.

Optical module for vibrating light beam

Growing community of inventors

Yongin-si, South Korea

Seungho Myoung