Samsung Electronics Co., Ltd.

Seungho Gwak

Kyungwon Yun

Chiyoung Lee

Gilwoo Song

Kwangrak Kim

Taeyong Jo

Yoonsung Bae

Seunggun Byoun

Younghoon Shin

A method of manufacturing a semiconductor device includes forming a pattern on a wafer, measuring a spectrum of the pattern on the wafer, with a spectral optical system, performing an analysis of the spectrum through a deep learning model for predicting pattern characteristics, the deep learning model being trained based on a domain knowledge, and evaluating the pattern on the wafer based on the analysis of the spectrum, wherein the domain knowledge includes a noise inducing factor of the spectral optical system.

Method of training deep learning model for predicting pattern characteristics and method of manufacturing semiconductor device

Growing community of inventors

Seoul, South Korea

Seungho Gwak