Samsung Electronics Co., Ltd.

Seunggun Byoun

Kyungwon Yun

Chiyoung Lee

Gilwoo Song

Kwangrak Kim

Taeyong Jo

Yoonsung Bae

Seungho Gwak

Younghoon Shin

A method of manufacturing a semiconductor device includes forming a pattern on a wafer, measuring a spectrum of the pattern on the wafer, with a spectral optical system, performing an analysis of the spectrum through a deep learning model for predicting pattern characteristics, the deep learning model being trained based on a domain knowledge, and evaluating the pattern on the wafer based on the analysis of the spectrum, wherein the domain knowledge includes a noise inducing factor of the spectral optical system.

Method of training deep learning model for predicting pattern characteristics and method of manufacturing semiconductor device

Growing community of inventors

Suwon-si, South Korea

Seunggun Byoun