Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Seungbum Hong

Yusin Yang

Younghoon Sohn

Souk Kim

Seokjung Yun

Sungyoon Ryu

Kwangeun Kim

Hoon Bae Kim

Hoon Sik Kim

Jiwon Yeom

A method of operating an atomic force microscope (AFM) is provided. The method includes inspecting a sample by using the AFM and inspecting a tip of a probe of the AFM by using a characterization sample. The characterization sample includes a first characterization pattern that includes a line and space pattern of a first height, a second characterization pattern that includes a line and space pattern of a second height that is lower than the first height, and a third characterization pattern that includes a line and space pattern of a third height that is lower than the second height, and includes a rough surface.

Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device

A test apparatus includes a movable stage to support a sample, tips above the stage that have different shapes and alternately perform profiling and milling on the sample, a tip stage connected to a cantilever coupled to the tips, the tip stage to adjust a position of the cantilever, a position sensor to obtain information about a positional relationship between the tips and the sample, a stage controller to control movements of the stage and the tip stage, based on the information about the positional relationship, and a tip controller to select the tips for performing the profiling or milling and to determine conditions for performing milling, wherein a depth of the sample being processed by the milling in the first direction is controlled based on a relationship between a distance between the tips and the sample and a force between the tips and the sample.

Test apparatus and test method thereof

Growing community of inventors

Daejeon, South Korea

Seungbum Hong