Samsung Display Co., Ltd.

K. C. Tech Co., Ltd.

Ubmaterials Lnc.

Seungbae Kang

Heesung Yang

Woojin Cho

Byoungkwon Choo

Joon-Hwa Bae

Byoung Kwon Choo

Bonggu Kang

Junggun Nam

Seungik Kang

Keunwoo Lee

Pungseok Kim

Jin Hyung Park

Youngho Jeong

Hyun Ju

A substrate polishing apparatus including a stage configured to load a substrate, the stage having a flat surface, which is parallel to a first direction and a second direction, and on which the substrate is loaded, a pressing unit configured to exert a pressure on the substrate in a third direction, a rotary unit configured to revolve the pressing unit around a central axis parallel to the third direction, when viewed in a plan view, a plurality of polishing pads provided between the pressing unit and the substrate to be in contact with the substrate, and a nozzle part configured to supply a slurry onto the substrate. The polishing pads may be spaced apart from each other in a direction and may have a rectangular shape in the plan view.

Substrate polishing apparatus

The method of manufacturing a display device includes preparing a substrate having a first and second area surrounding a portion of the first area, forming a semiconductor layer in the first area, forming a first insulating layer covering the semiconductor layer, forming a gate electrode layer that at least partially overlaps the semiconductor layer, forming a pad electrode layer in the second area, forming a second insulating layer covering the gate electrode layer, forming contact holes that at least partially expose the semiconductor layer and the gate electrode layer, and forming a conductive layer positioned in the contact holes and including a first and second layer. The forming of the conductive layer includes forming a first layer material and a second layer material, and removing a portion of the first layer material and a portion of the second layer material to expose the second insulating layer.

Method of manufacturing display device comprising selectively removing a conductive layer

A polishing slurry is disclosed which includes about 0.01 wt % to about 10 wt % of polishing particles, about 0.005 wt % to about 0.1 wt % of a dispersing agent, about 0.001 wt % to about 1 wt % of an oxide-polishing promoter including a pyridine compound, about 0.05 wt % to about 0.1 wt % of a nitride-polishing inhibitor including an amino acid or an anionic organic acid, and water. A method for manufacturing a display device including an active pattern disposed on a base substrate, a gate metal pattern including a gate electrode overlapping the active pattern, a planarized insulation layer disposed on the gate metal pattern, and a source metal pattern disposed on the planarized insulation layer is also disclosed.

Polishing slurry, method for manufacturing a display device using the same and display device

An apparatus for manufacturing a display device includes a moving part including a belt that circulates, a roller that circulates the belt, and at least one meandering prevention portion that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt, and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt. A part of the at least one meandering prevention portion faces a second surface of the belt, the second surface being a side surface of the belt.

Apparatus and method for manufacturing display device

A method of manufacturing a detection sensor is disclosed. The method includes forming a biometric information sensing layer including a transistor on a base layer, forming an initial optical pattern layer on the biometric information sensing layer, patterning the initial optical pattern layer to form a plurality of transmissive portions spaced apart from each other and having a first zeta potential, coating a light blocking material to form an initial light blocking portion that covers a side surface and an upper surface of the transmissive portions and has a second zeta potential different from the first zeta potential, and polishing the initial light blocking portion such that the upper surface of the transmissive portions is exposed to form a light blocking portion. The initial light blocking portion is polished by the abrasive, which has the first zeta potential, using a pad.

Display device including detection sensor and method of manufacturing the detection sensor

An apparatus for manufacturing a display apparatus includes: a polisher at which a polishing material is supplied to a base member of the display apparatus and the base member is polished with the polishing material to provide a polished base member having a polished surface; a conveyer to which the polished base member is provided from the polisher and from which the polished base member is transferred to outside the apparatus; and a suction unit corresponding to the conveyer and by which a pressure around the conveyer is provided to be lower than a pressure at remaining portions of the apparatus.

Manufacturing apparatus and method of manufacturing display apparatus using the same

Provided are a display device and a method of manufacturing the display device. The display device includes a substrate including a display area and a peripheral area outside the display area, a plurality of data lines disposed in the display area, a plurality of lines disposed in the display area, respectively connected to the plurality of data lines, and configured to respectively transmit a data signal from a driving circuit disposed in the peripheral area to the plurality of data lines, an insulating layer covering the plurality of lines; and a light-emitting element disposed on the insulating layer, wherein each of the plurality of lines comprises a plurality of branches branched in a direction crossing an extending direction of the line, and a black layer is disposed on an insulating layer at a position corresponding to an interval between a plurality of adjacent branches in a vertical direction.

Growing community of inventors

Yongin-si, South Korea

Seungbae Kang