Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,906 patents)
2 patents:
1. 11521866 - Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
2. 11037806 - Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus