Samsung Electronics Co., Ltd.

Seung-yong Oh

Min Gyu Kim

Hoon Bae Kim

Tae-gon Kim

Hyun-hee Lee

Dae-Gab Chi

Hyun-joon Park

Byoung Joo Kim

Ki-Yoon Kim

A conveyor apparatus is provided. The conveyor apparatus includes a rail formed in a closed curve line, a chain conveyor that moves along the rail, a driver that drives the chain conveyor, and a first and a second variable conveyors that relatively vary lengths of at least two portions of the chain conveyor so that a section of the chain conveyor remains in position while other portions of the chain conveyor moving along the rail.

Conveyor apparatus

A method of correcting a position of a prober, the method including obtaining a first image of a pad, the pad having a predetermined reference contact position, contacting the prober to the pad after obtaining the first image of the pad, obtaining a second image of the pad after contacting the prober to the pad, determining an actual contact position of an actual contact mark on the pad, the actual contact mark being produced by the contacting of the prober to the pad, comparing the second image to the first image to obtain an offset data, the offset data relating the actual contact position to the reference contact position, and correcting the position of the prober by aligning the actual contact position with the reference contact position based on the offset data.

Method of correcting a position of a prober

Growing community of inventors

Suwon-si, South Korea

Seung-yong Oh