Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Seung-mo Lim

Jae-woo Chung

Hwa-sun Lee

Jae-Chang Lee

Kyo-yeol Lee

Tae-kyung Lee

Sung-gyu Kang

Chang-youl Moon

Jae-chang Lee

Sung-Hee Lee

Su-ho Shin

Tae-Woon Cha

Hee-moon Jeong

Jung-min Oh

Chang-hoon Jung

Jong-beom Kim

Kae-dong Back

Sang-chae Kim

Kyung-hee You

Tae-kyun Lee

A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

Method of forming a piezoelectric actuator of an inkjet head

A piezoelectric inkjet printhead includes a manifold, a chamber array including a plurality of chambers in connection with the manifold and arranged along at least one side of the manifold, a vibrating plate to cover the plurality of chambers, and a plurality of piezoelectric actuators formed on the vibrating plate to change pressures of corresponding ones of the plurality of chambers by vibrating the vibrating plate. The plurality of chambers includes a plurality of pressure chambers disposed in a center portion of the chamber array and having corresponding ink ejecting nozzles, and at least two dummy chambers, one disposed on each side of the chamber array and having corresponding dummy nozzles that do not eject ink. A plurality of trenches may be formed in the vibrating plate between each of the piezoelectric actuators.

Piezoelectric inkjet printhead

A method of forming a hydrophobic coating layer on a surface of a nozzle plate of an inkjet printhead includes forming a plurality of nozzles in the nozzle plate, each of the nozzles having an exit, stacking a film on the surface of the nozzle plate to cover the exit of each of the nozzles, forming a predetermined metal layer on an inner wall of each of the nozzles and an inner surface of the film covering the exit of each of the nozzles using a plating method, removing the film from the surface of the nozzle plate, forming a hydrophobic coating layer on the surface of the nozzle plate to cover the metal layer exposed through the exit of each of the nozzles, and removing the metal layer formed on the inner wall of each of the nozzles and the hydrophobic coating layer formed on the surface of the metal layer.

Method of forming hydrophobic coating layer on surface of nozzle plate of inkjet printhead

A nozzle plate of an inkjet printhead, and a method of manufacturing the nozzle plate. The nozzle plate includes a substrate through which nozzles are formed; an ink-philic coating layer formed on an outer surface of the substrate and inner walls of the nozzles; and an ink-phobic coating layer selectively formed on the ink-philic coating layer disposed around the nozzles.

Nozzle plate of inkjet printhead and method of manufacturing the nozzle plate

A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.

Method for manufacturing piezoelectric ink-jet printhead

An actuating device is provided, which includes a deformable membrane, walls formed on the membrane to define cavities, rods formed within the cavities, and on the surface of the membrane on one side with reference to a cavity center, to move in association with the deformation of the membrane, and an actuating unit formed on a lower side of the membrane to be piezoelectrically driven to deform the membrane. The actuating device is applicable to miniaturized electronic devices and can actuate the function modules appropriately.

Actuating device, fabricating method thereof, and module variation control device using the actuating device

In a piezoelectric actuator for an ink-jet printhead, and a method of forming the same, formed on a flow path plate having a pressurizing chamber, the piezoelectric actuator for applying a driving force for ink ejection to the pressurizing chamber, the piezoelectric actuator includes a lower electrode formed on the flow path plate, a bonding pad formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit for voltage application is bonded to an upper surface of the bonding pad, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad, and an upper electrode formed on the piezoelectric layer, wherein an end of the upper electrode extends beyond the end of the piezoelectric layer and contacts the upper surface of the bonding pad.

Piezoelectric actuator for an ink-jet printhead and method of forming the same

A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

Piezoelectric actuator inkjet head and method of forming the same

A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head

A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

Method of forming piezoelectric actuator of inkjet head

A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

Defect detection device of a print head and method of detecting defect of a print head

A piezoelectric inkjet printhead, and a method of manufacturing the same, includes an ink inlet for allowing inflow of ink, a plurality of pressure chambers to contain ink to be ejected, the plurality of pressure chambers being in communication with the ink inlet, a manifold formed in communication with the ink inlet, a plurality of restrictors connecting the manifold to respective first ends of the pressure chambers, a plurality of dampers at positions corresponding to respective second ends of the pressure chambers, the second ends being opposite the first ends, a plurality of nozzles in communication with the plurality of dampers for ejecting the ink, a plurality of actuators for applying a driving force to each of the pressure chambers for ejecting the ink, a damping membrane under the manifold for dampening a pressure change inside the manifold and a cavity under the damping membrane.

Piezoelectric inkjet printhead and method of manufacturing the same

In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same

A piezoelectric actuator for providing a driving force to a pressure chamber of an ink-jet printhead for ejecting ink by deforming a vibration plate, the vibration plate forming an upper wall of the pressure chamber, the piezoelectric actuator including a lower electrode formed on the vibration plate, a piezoelectric film having either: (a) peripheral portions, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber and having a space between the peripheral portions and the lower electrode, or (b) a lateral surface, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber, the lateral surface of the piezoelectric film substantially forming a right angle with respect to a top surface of the lower electrode, and an upper electrode formed on the piezoelectric film for applying a voltage to the piezoelectric film.

Growing community of inventors

Suwon-si, South Korea

Seung-mo Lim