Samsung Electronics Co., Ltd.

Global Standard Technology Co., Ltd.

Seung Jin Yang

Jin Young Park

Jin Yong Jang

Jin Kyu Choi

Eun Seok Hong

Yong Ho Choi

Gil Yoon Kim

Chi Won Choi

Je Min Kim

Hyeung Kwan Kim

Chun Mok Chung

Jong Bae Kim

Jae Suk Heo

The present invention relates to a high-tech temperature control device for a semiconductor manufacturing facility and, more specifically, to a high-tech temperature control device for an electrostatic chuck, which supports a wafer and maintains the temperature in a semiconductor wafer processing process. It is possible to very precisely control a temperature of an electrostatic chuck by maintaining temperatures and a mixing flow rate of a heating heat medium and a cooling heat medium constant and adjusting a mixing ratio. Meanwhile, the heat medium after heating and cooling is collected and reused, thereby efficiently using energy.

High-tech temperature control device for semiconductor manufacturing facility

A cache and a method for performing data copying are provided. The cache includes a copy logic and be connected to a processor through a first bus and to a memory controller through a second bus, which is different from the first bus. Moreover, the copy logic may perform data copying through the second bus based on a data copy command received from the processor.

Method and apparatus for copying data using cache

Growing community of inventors

Seoul, South Korea

Seung Jin Yang