Samsung Electronics Co., Ltd.

Seung-hak Park

Sang Ouk Kim

Kyoung-seon Kim

Shi-Yong Yi

Seok-hwan Oh

Dong Ki Yoon

A method of forming a fine pattern includes forming an organic guide layer on a substrate, forming a photoresist pattern on the organic guide layer, the photoresist pattern including a plurality of openings exposing portions of the organic guide layer, forming a material layer on the exposed portions of the organic guide layer and on the photoresist pattern, the material layer including block copolymers, and rearranging the material layer through phase separation of the block copolymers into a fine pattern layer, such that the fine pattern layer includes a plurality of first blocks and a plurality of second blocks arranged in an alternating pattern, the plurality of first blocks and the plurality of the second blocks having different repeating units of the block copolymers.

Growing community of inventors

Bucheon-si, South Korea

Seung-hak Park